Self-Monitoring Temperature Distribution of Single-Photon Avalanche Diode Array

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Yu-Wei Lu;Yao-Lun Liu;Chih-Yun Liao;Chun-Hsien Liu;Chia-Yi Chu;Meng-Hsuan Lu;Tien-Ning Chang;Jenq-Shinn Wu;Jau Yang Wu;Chia-Ming Tsai;Sheng-Di Lin
{"title":"Self-Monitoring Temperature Distribution of Single-Photon Avalanche Diode Array","authors":"Yu-Wei Lu;Yao-Lun Liu;Chih-Yun Liao;Chun-Hsien Liu;Chia-Yi Chu;Meng-Hsuan Lu;Tien-Ning Chang;Jenq-Shinn Wu;Jau Yang Wu;Chia-Ming Tsai;Sheng-Di Lin","doi":"10.1109/JSEN.2024.3487086","DOIUrl":null,"url":null,"abstract":"We propose and verify on-chip temperature-sensing using single-photon avalanche diodes (SPADs) in complementary metal-oxide–semiconductor (CMOS) process. The dark count rate of SPAD is sensitive to device temperature and of use for temperature monitoring. The best measured noise-equivalent temperature difference is less than \n<inline-formula> <tex-math>$0.17~^{\\circ }$ </tex-math></inline-formula>\nC over the range of 10 °C–60 °C. A \n<inline-formula> <tex-math>$32\\times 32$ </tex-math></inline-formula>\n SPAD array with an on-chip heat source has been deployed to demonstrate its capability of 2-D temperature mapping. The good consistence between the measured temperature distributions and the simulated ones has been observed.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"24 24","pages":"40439-40445"},"PeriodicalIF":4.3000,"publicationDate":"2024-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10741250/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

Abstract

We propose and verify on-chip temperature-sensing using single-photon avalanche diodes (SPADs) in complementary metal-oxide–semiconductor (CMOS) process. The dark count rate of SPAD is sensitive to device temperature and of use for temperature monitoring. The best measured noise-equivalent temperature difference is less than $0.17~^{\circ }$ C over the range of 10 °C–60 °C. A $32\times 32$ SPAD array with an on-chip heat source has been deployed to demonstrate its capability of 2-D temperature mapping. The good consistence between the measured temperature distributions and the simulated ones has been observed.
求助全文
约1分钟内获得全文 求助全文
来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信