Mitigation of Mechanical Crosstalk in Resonant Beam Accelerometers

Abstract

Resonant micro-electromechanical system (MEMS) beam accelerometers have demonstrated remarkable sensitivity and stability, enabling applications in seismology and gravimetry while keeping a small footprint. However, mechanical crosstalk and resonance mode coupling have shown to be specially detrimental to the operation of this kind of accelerometers, especially when employing nanoresonators as the transduction element. In this study, we investigate the mechanical crosstalk of nanoresonator-based accelerometers, through measurement, modeling, and simulation of a pendulum accelerometer. We introduce a novel methodology for the early identification of crosstalk during the accelerometer design phase, facilitating proactive detection and mitigation of this issue. Finally, we propose an innovative technique that effectively minimizes mechanical crosstalk with a minimum impact on performance, applicable to a large number of structures. This involves the mechanical decoupling of vibrational modes within the beam resonator from the rest of the accelerometer structure.