Enhanced Barrier and Optical Properties of Inorganic Nano-Multilayers on PEN Substrate Through Hybrid Deposition.

IF 3.1 3区材料科学 Q3 CHEMISTRY, PHYSICAL

Materials Pub Date : 2024-12-08 DOI:10.3390/ma17236007

Xiaojie Sun, Lanlan Chen, Wei Feng

{"title":"Enhanced Barrier and Optical Properties of Inorganic Nano-Multilayers on PEN Substrate Through Hybrid Deposition.","authors":"Xiaojie Sun, Lanlan Chen, Wei Feng","doi":"10.3390/ma17236007","DOIUrl":null,"url":null,"abstract":"In this study, an inorganic multilayer barrier film was fabricated on the polyethylene naphthalate (PEN) substrate, which was composed of a SiO2 layer prepared by inductively coupled plasma chemical vapor deposition (ICP-CVD) and a Al2O3/ZnO nanolaminate produced by plasma-enhanced atomic layer deposition (PEALD). The multilayer composite film with a structure of 50 nm SiO2 + (4.5 nm Al2O3/6 nm ZnO) × 4 has excellent optical transmittance (88.1%) and extremely low water vapor permeability (3.3 × 10-5 g/m2/day, 38 °C, 90% RH), indicating the cooperation of the two advanced film growth methods. The results suggest that the defects of the SiO2 layer prepared by ICP-CVD were effectively repaired by the PEALD layer, which has excellent defect coverage. And Al2O3/ZnO nanolaminates have advantages over single-layer Al2O3 due to their complex diffusion pathways. The multilayer barrier film offers potential for encapsulating organic electronic devices that require a longer lifespan.","PeriodicalId":18281,"journal":{"name":"Materials","volume":"17 23","pages":""},"PeriodicalIF":3.1000,"publicationDate":"2024-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11643419/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.3390/ma17236007","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}

引用次数: 0

Abstract

In this study, an inorganic multilayer barrier film was fabricated on the polyethylene naphthalate (PEN) substrate, which was composed of a SiO₂ layer prepared by inductively coupled plasma chemical vapor deposition (ICP-CVD) and a Al₂O₃/ZnO nanolaminate produced by plasma-enhanced atomic layer deposition (PEALD). The multilayer composite film with a structure of 50 nm SiO₂ + (4.5 nm Al₂O₃/6 nm ZnO) × 4 has excellent optical transmittance (88.1%) and extremely low water vapor permeability (3.3 × 10^-5 g/m²/day, 38 °C, 90% RH), indicating the cooperation of the two advanced film growth methods. The results suggest that the defects of the SiO₂ layer prepared by ICP-CVD were effectively repaired by the PEALD layer, which has excellent defect coverage. And Al₂O₃/ZnO nanolaminates have advantages over single-layer Al₂O₃ due to their complex diffusion pathways. The multilayer barrier film offers potential for encapsulating organic electronic devices that require a longer lifespan.

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本研究在聚萘二甲酸乙二醇酯（PEN）基底上制备了一种无机多层阻隔膜，该膜由电感耦合等离子体化学气相沉积（ICP-CVD）制备的二氧化硅层和等离子体增强原子层沉积（PEALD）制备的氧化铝/氧化锌纳米层组成。结构为 50 nm SiO2 + (4.5 nm Al2O3/6 nm ZnO) × 4 的多层复合薄膜具有出色的光学透过率（88.1%）和极低的水蒸气渗透率（3.3 × 10-5 g/m2/day，38 °C，90% RH），这表明两种先进的薄膜生长方法相互配合。结果表明，ICP-CVD 制备的二氧化硅层的缺陷被 PEALD 层有效修复，PEALD 层具有极佳的缺陷覆盖率。而 Al2O3/ZnO 纳米层压材料因其复杂的扩散途径而比单层 Al2O3 更具优势。多层阻挡层薄膜为封装需要更长使用寿命的有机电子器件提供了潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials MATERIALS SCIENCE, MULTIDISCIPLINARY-

CiteScore

5.80

自引率

14.70%

发文量

7753

审稿时长

1.2 months

期刊介绍： Materials (ISSN 1996-1944) is an open access journal of related scientific research and technology development. It publishes reviews, regular research papers (articles) and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. Therefore, there is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Materials provides a forum for publishing papers which advance the in-depth understanding of the relationship between the structure, the properties or the functions of all kinds of materials. Chemical syntheses, chemical structures and mechanical, chemical, electronic, magnetic and optical properties and various applications will be considered.