A High-Performance Surface Acoustic Wave Humidity Sensor with Uniform Multiwrinkled Graphene Oxide Film

IF 8.2 1区 化学 Q1 CHEMISTRY, ANALYTICAL
Gai Yang, Li Peng, Shiqian Cai, Huikai Xie, Feng Gao, Xiaoyi Wang
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引用次数: 0

Abstract

Humidity sensors were widely used in Internet of Things (IoT) applications. According to medical respiration monitoring, noncontact sensing, and human–computer interface requirements, fast response and high repeatability are important for efficient and precise signal acquisition. Previous research works mainly focus on sensitivity improvement with the scarification of response time, stability, and repeatability. In this paper, we proposed the surface acoustic wave (SAW) humidity sensors with comprehensive performance using the uniform multiwrinkled graphene oxide (GO) films as the sensing material obtained by vacuum filtration and liquid phase transfer method. The multiwrinkled GO films offered controllable thickness (thin to 29 nm), uniform wafer-level fabrication (2 in.), and abundant wrinkle, making them become effective sensitive films for SAW humidity sensors due to numerous adsorption sites and transfer channels for water molecules. The experimental results showed that the sensors can obtain high sensitivity (10.5 kHz/RH%@60 nm thick film), ultrafast response (∼45 ms), good stability (variation amplitude ∼0.1%), repeatability (variation amplitude ∼1%), and wafer-level fabrication capability demonstrating their practical applications for medical respiration monitoring, noncontact sensing, and human–computer interface.

Abstract Image

均匀多皱氧化石墨烯膜的高性能表面声波湿度传感器
湿度传感器在物联网应用中得到了广泛的应用。根据医学呼吸监测、非接触传感和人机界面的要求,快速响应和高重复性对高效、精确的信号采集至关重要。以往的研究工作主要集中在提高灵敏度的同时降低响应时间、稳定性和可重复性。本文以真空过滤和液相转移法制备的均匀多皱氧化石墨烯(GO)薄膜为传感材料,提出了一种综合性能的表面声波(SAW)湿度传感器。多皱氧化石墨烯薄膜具有可控制的厚度(薄至29纳米)、均匀的晶圆级制造(2英寸)和丰富的褶皱,由于水分子的大量吸附位点和转移通道,使其成为SAW湿度传感器的有效敏感薄膜。实验结果表明,该传感器具有高灵敏度(10.5 kHz/RH%@60 nm厚膜)、超快响应(~ 45 ms)、良好的稳定性(变化幅度~ 0.1%)、可重复性(变化幅度~ 1%)和晶圆级制造能力,在医疗呼吸监测、非接触传感和人机界面等方面具有实际应用价值。
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来源期刊
ACS Sensors
ACS Sensors Chemical Engineering-Bioengineering
CiteScore
14.50
自引率
3.40%
发文量
372
期刊介绍: ACS Sensors is a peer-reviewed research journal that focuses on the dissemination of new and original knowledge in the field of sensor science, particularly those that selectively sense chemical or biological species or processes. The journal covers a broad range of topics, including but not limited to biosensors, chemical sensors, gas sensors, intracellular sensors, single molecule sensors, cell chips, and microfluidic devices. It aims to publish articles that address conceptual advances in sensing technology applicable to various types of analytes or application papers that report on the use of existing sensing concepts in new ways or for new analytes.
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