Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-10-11 DOI:10.1109/JMEMS.2024.3469274

Changfeng Xia;Dayong Qiao;Anjie Peng;Zhen Chen;Xudong Song;Xiumin Song;Pengwen Xiong

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引用次数: 0

Abstract

This paper presents an analytical solution for the nonlinear dynamics of electrostatically driven MEMS scanning mirrors. These mirrors are widely used due to their small size, low cost, and low power consumption. However, nonlinearities in MEMS mirror’s amplitude-frequency response complicate control and design. Traditional numerical methods are time-consuming. This study uses a nonlinear approximation method and the averaging method to derive analytical solutions, improving design efficiency. Simulations and experiments validate these solutions, demonstrating good agreement for large amplitudes. The paper elucidates the origins of nonlinear phenomena such as threshold voltage, hysteresis in frequency response, and frequency shifts. An expression for the maximum vibration amplitude is derived, providing valuable insights for optimizing MEMS scanning mirrors. These findings provide a theoretical foundation for enhancing amplitude control, expediting the design process, and improving the performance of MEMS scanning mirrors.[2024-0128]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.