Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events

Abstract

This paper reports on the development of a monolithic capacitive accelerometer array system that has a designed full-scale range of $\pm 5~{\mathrm {\text {k}{g} }}$ , a bandwidth larger than $10~{\mathrm {\text {k}\text {Hz} }}$ , with a minimum resolution of $\mathrm {5~\text {m}{g} }$ and a minimum bias instability of $\mathrm {700~\mu {g} }$ . The resolution and full-scale range of the accelerometers correspond to a dynamic range of 120 dB that is on par with state-of-the-art low- $\mathrm {{g} }$ accelerometers. High bandwidth and $\mathrm {\text {k}{g} }$ detectability are achieved by the nano-gram proof mass and relatively stiff folded-flexure transducer design. High dynamic range with $\mathrm {\text {k}{g} }$ input range is enabled by the hourglass-beam, interdigitated tapered comb-finger electrodes, and arrayed accelerometers. The accelerometer array design provides a potential path towards an emerging navigation through high-shock application.[2024-0091]