A 0.017 ∘/h Rate-Integrating Micro-Shell Resonator Gyroscope Using Virtual Rotation Modulation

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-10-16 DOI:10.1109/JMEMS.2024.3474054

Sheng Yu;Jiangkun Sun;Yongmeng Zhang;Kun Lu;Yan Shi;Xuezhong Wu;Dingbang Xiao

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引用次数: 0

Abstract

In this letter, a high-performance micro-shell resonator gyroscope (MSRG) working on rate-integrating mode with virtual rotation modulation (VRM) is presented for the first time. To suppress the angle-dependent bias and improve the long-term accuracy of MSRG, its vibrating pattern is virtually set to rotate forward and backward periodically, which is called virtual rotation modulation. Combined with the self-calibration for the virtual rotating rate and the aniso-damping, the RMS error of the device output under VRM is reduced. The experimental results show the MSRG with VRM can achieve a long-term bias instability (BI) of

$0.017~^{\circ }$

/h, a wide measurement range of

$\pm 1200~^{\circ }$

/s with the scale factor nonlinearity of 0.77 ppm, a bandwidth of 200 Hz and a resolution and threshold of

$\lt 0.004~^{\circ }$

/s. [2024-0106]

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0.017°/h虚旋转调制积分速率微壳谐振陀螺仪

本文首次提出了一种工作在速率积分模式和虚拟旋转调制（VRM）下的高性能微壳谐振陀螺仪（MSRG）。为了抑制角相关偏置，提高MSRG的长期精度，将其振动模式虚拟地设置为周期性的前后旋转，称为虚拟旋转调制。结合对虚拟转速和各向异性阻尼的自标定，减小了VRM下器件输出的均方根误差。实验结果表明，带VRM的MSRG可以实现$0.017~^{\circ}$ /h的长期偏置不稳定性（BI）， $\pm 1200~^{\circ}$ /s的宽测量范围，比例因子非线性为0.77 ppm，带宽为200 Hz，分辨率和阈值为$\lt 0.004~^{\circ}$ /s。(2024 - 0106)

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.