Study on the properties of Cr/CrxN films prepared by magnetron sputtering and ion implantation alternately

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2024-11-23 DOI:10.1016/j.vacuum.2024.113874

Feilong Wang , Shuo Wang , Zhiyu Chi , Junbo Niu , Xinghong Zhang , Jinbao Huang , Xinxin Ma

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引用次数: 0

Abstract

In this study, the efficacy of Cr/Cr_xN multilayer films, fabricated on 8Cr4Mo4V bearing steel substrates via Plasma-Based Ion Implantation and Deposition (PBIID) technique, was thoroughly examined. Utilizing a multifunctional coating apparatus, the surface engineering process was optimized for efficiency and precision, yielding controllable periodic Cr/Cr_xN films. Characterizations conducted with XPS, XRD, and TEM disclosed a 'stacked' stratified film structure that resonates with the process periodicity, characterized by a 17 nm cycle and consisting of dispersed nanocrystalline (Cr, CrN, and Cr₂N). These multilayer structures markedly enhanced the corrosion resistance of the material, with the treated 8Cr4Mo4V specimens demonstrating a corrosion current density of 2.47 × 10⁻⁷ A cm⁻², which is an order of magnitude reduction compared to the original sample of 7.60 × 10⁻⁶ A cm⁻². A series equivalent circuit model was developed to simulate the corrosion dynamics. The nitridation effect induced by ion implantation was instrumental in attaining a surface nanohardness of 19 GPa, approximately doubling the original hardness, while also achieving a coating-substrate adhesion force of 105 mN due to the peening effect. This method can be applied to improve the corrosion resistance life of precision parts, especially complex parts.

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磁控溅射与离子注入交替制备Cr/CrxN薄膜的性能研究

在本研究中，采用等离子体离子注入沉积（PBIID）技术在8Cr4Mo4V轴承钢衬底上制备了Cr/CrxN多层膜，并对其性能进行了深入研究。利用多功能镀膜装置，优化了表面工程工艺的效率和精度，获得了可控的Cr/CrxN周期膜。通过XPS、XRD和TEM进行表征，发现了一种与工艺周期共振的“堆叠”层状膜结构，其特征为17 nm周期，由分散的纳米晶体（Cr、CrN和Cr2N）组成。这些多层结构显著提高了材料的耐腐蚀性，处理后的8Cr4Mo4V样品的腐蚀电流密度为2.47 × 10−7 a cm−2，与原始样品的7.60 × 10−6 a cm−2相比，降低了一个数量级。建立了串联等效电路模型来模拟腐蚀动力学。离子注入诱导的氮化效应有助于获得19 GPa的表面纳米硬度，大约是原始硬度的两倍，同时由于强化效应，涂层与基体的附着力达到105 mN。该方法可用于提高精密零件，特别是复杂零件的耐腐蚀寿命。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.