Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Renjie Tan, Yong Xia, Xiangguang Han, Linya Huang, Wendi Gao, Chen Jia, Ping Yang, Qijing Lin, Shujiang Ding, Chenying Wang, Libo Zhao
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引用次数: 0

Abstract

Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing, minimally invasive surgery, and other narrow operating spaces, where currently available commercial sensors cannot meet the requirements because of their large size. In this study, a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3 × 9.3 × 0.98 mm was designed, fabricated, and tested. A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams, comb capacitors, and parallel capacitors was employed. A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk. The proposed S-shaped beams achieved a large measurement range through stress optimization. The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses. The test results show that the proposed sensing chip can detect six-axis force/torque separately, with all crosstalk errors less than 2.59%FS. Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm, respectively. The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm) for force and torque detection, respectively.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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