Rapid fabrication of through-hole arrays in thin glass by femtosecond laser bursts assisted with chemical etching

IF 3.5 2区工程技术 Q2 OPTICS

Optics and Lasers in Engineering Pub Date : 2024-11-24 DOI:10.1016/j.optlaseng.2024.108698

Quanji Wang , Shaorui Yang , Le Liu , Zijing Yang , Xinke Xu , Si Wu , Xiaohui Su , Jun Duan , Lei Liu , Wei Xiong , Leimin Deng

{"title":"Rapid fabrication of through-hole arrays in thin glass by femtosecond laser bursts assisted with chemical etching","authors":"Quanji Wang , Shaorui Yang , Le Liu , Zijing Yang , Xinke Xu , Si Wu , Xiaohui Su , Jun Duan , Lei Liu , Wei Xiong , Leimin Deng","doi":"10.1016/j.optlaseng.2024.108698","DOIUrl":null,"url":null,"abstract":"<div><div>A large-area vertical through-hole array in thin glass is rapidly fabricated by using femtosecond laser bursts assisted with chemical etching. By investigating the effects of the sub-pulse number and total pulse energy on the morphologies of the ablated microholes, as well as the effects of the chemical etching time and the concentration of HF acid solution on the morphologies of the through-holes, it is found that only under the condition that the upper surface of the glass microhole arrays is not ablated, but the exit is ablated by the femtosecond laser bursts with the increase of the sub-pulse number, a uniform and nearly vertical through-hole array can be obtained after etching in 5-wt% HF acid solution for 20 min. This single-step femtosecond laser bursts scanning method can significantly improve the fabrication efficiency of the ablated microhole arrays to about 18,000 microholes per second, which might provide a new technical guide for rapidly fabricating large-area vertical through-hole arrays in thin glass.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"185 ","pages":"Article 108698"},"PeriodicalIF":3.5000,"publicationDate":"2024-11-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0143816624006766","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

Abstract

A large-area vertical through-hole array in thin glass is rapidly fabricated by using femtosecond laser bursts assisted with chemical etching. By investigating the effects of the sub-pulse number and total pulse energy on the morphologies of the ablated microholes, as well as the effects of the chemical etching time and the concentration of HF acid solution on the morphologies of the through-holes, it is found that only under the condition that the upper surface of the glass microhole arrays is not ablated, but the exit is ablated by the femtosecond laser bursts with the increase of the sub-pulse number, a uniform and nearly vertical through-hole array can be obtained after etching in 5-wt% HF acid solution for 20 min. This single-step femtosecond laser bursts scanning method can significantly improve the fabrication efficiency of the ablated microhole arrays to about 18,000 microholes per second, which might provide a new technical guide for rapidly fabricating large-area vertical through-hole arrays in thin glass.

查看原文本刊更多论文

用飞秒激光脉冲辅助化学蚀刻快速制造薄玻璃上的通孔阵列

利用飞秒激光脉冲辅助化学蚀刻技术，在薄玻璃上快速制备了大面积垂直通孔阵列。通过研究子脉冲数和总脉冲能量对烧蚀微孔形貌的影响，以及化学蚀刻时间和HF酸溶液浓度对通孔形貌的影响，发现只有在玻璃微孔阵列的上表面不烧蚀的情况下，出口才会随着子脉冲数的增加而被飞秒激光暴烧蚀；在5-wt% HF酸溶液中刻蚀20 min后，可以得到均匀且接近垂直的通孔阵列。这种单步飞秒激光爆发扫描方法可以显著提高烧蚀微孔阵列的制作效率，达到每秒约18000个微孔，为薄玻璃中大面积垂直通孔阵列的快速制作提供了新的技术指导。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Optics and Lasers in Engineering 工程技术-光学

CiteScore

8.90

自引率

8.70%

发文量

384

审稿时长

42 days

期刊介绍： Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques