High Crystalline Quality Ta-Doped h-ZnTiO3 Epitaxial Films: Characteristics and Application in UV Detectors

IF 4.3 3区 材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Biao Zhang, Xiaochen Ma*, HongYan Zhu, Hongdi Xiao, Jin Ma and Caina Luan*, 
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Abstract

Ta-doped h-ZnTiO3 (h-ZnTiO3:Ta) films with an atomic ratio of 0–5% are grown on sapphire substrates by pulsed laser deposition. The prepared films exhibit n-type semiconductor behavior with high epitaxial crystalline quality. These films have high transparency, and their optical band gaps exceed 3.72 eV. The Hall mobility and carrier concentration of the 1% Ta-doped film are 4.6 cm2/(V·s) and 4.20 × 1014 /cm3, respectively. The h-ZnTiO3:Ta film-based metal–semiconductor–metal (MSM) photodetectors are fabricated, and their characteristics are analyzed in detail. Among them, 1% Ta-doped h-ZnTiO3 film-based devices show the best detection performance, including responsivity of 4.23 mA/W and detectivity of 1.43 × 1011 Jones, under the wavelength of 308 nm ultraviolet light with an optical density of 140 μW/cm2. The detector also has an extremely fast response time (rise time: 0.16 s and fall time: 0.04 s). This work proves that h-ZnTiO3:Ta epitaxial films have great application prospects in future optoelectronic devices.

Abstract Image

掺杂 Ta 的高结晶质量 h-ZnTiO3 磊晶薄膜:紫外探测器的特性和应用
通过脉冲激光沉积法在蓝宝石衬底上生长出原子比为 0-5% 的掺 Ta h-ZnTiO3 (h-ZnTiO3:Ta)薄膜。制备出的薄膜具有 n 型半导体特性,外延结晶质量高。这些薄膜具有高透明度,其光带隙超过 3.72 eV。掺杂 1% Ta 的薄膜的霍尔迁移率和载流子浓度分别为 4.6 cm2/(V-s) 和 4.20 × 1014 /cm3。本文制作了基于 h-ZnTiO3:Ta 薄膜的金属-半导体-金属(MSM)光电探测器,并详细分析了它们的特性。其中,掺杂 1% Ta 的 h-ZnTiO3 膜基器件的探测性能最佳,在波长为 308 nm、光密度为 140 μW/cm2 的紫外光下,其响应率为 4.23 mA/W,探测率为 1.43 × 1011 Jones。该探测器的响应速度也非常快(上升时间:0.16 秒,下降时间:0.04 秒)。这项研究证明,h-ZnTiO3:Ta 外延薄膜在未来的光电器件中具有广阔的应用前景。
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来源期刊
CiteScore
7.20
自引率
4.30%
发文量
567
期刊介绍: ACS Applied Electronic Materials is an interdisciplinary journal publishing original research covering all aspects of electronic materials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials science, engineering, optics, physics, and chemistry into important applications of electronic materials. Sample research topics that span the journal's scope are inorganic, organic, ionic and polymeric materials with properties that include conducting, semiconducting, superconducting, insulating, dielectric, magnetic, optoelectronic, piezoelectric, ferroelectric and thermoelectric. Indexed/​Abstracted: Web of Science SCIE Scopus CAS INSPEC Portico
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