A Strategy for Fabricating Microscale Freestanding Single-Crystalline Complex Oxide Device Arrays

IF 4.3 3区材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

ACS Applied Electronic Materials Pub Date : 2024-11-01 DOI:10.1021/acsaelm.4c0148010.1021/acsaelm.4c01480

Huandong Chen, Yang Liu, Harish Kumarasubramanian, Mythili Surendran and Jayakanth Ravichandran*,

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Abstract

We present a general fabrication strategy for freestanding single-crystalline complex oxide device arrays via wet chemical etching-based microfabrication processes and epitaxial lift-off. Here, we used 0.5Ba(Zr_0.2Ti_0.8)O₃-0.5Ba(Zr_0.7Ti_0.3)O₃ (BCZT) as a model relaxor ferroelectric oxide system and La_0.7Sr_0.3MnO₃ as the sacrificial layer for demonstration. Arrays of SrRuO₃ (SRO)/BCZT/SRO ferroelectric capacitor mesas were first defined and isolated on the growth wafer, and then they were released using epitaxial lift-off with lithography-defined surrounding etching holes, after which the freestanding device arrays were integrated onto a glass substrate. Our proposed strategy sheds light on preparing various freestanding single-crystalline oxide devices and paves the way for their heterogeneous integration onto arbitrary substates.

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制造微米级独立单晶复合氧化物器件阵列的策略

我们介绍了一种通过基于湿化学蚀刻的微制造工艺和外延升华法制造独立单晶复合氧化物器件阵列的通用策略。在这里，我们使用 0.5Ba(Zr0.2Ti0.8)O3-0.5Ba(Zr0.7Ti0.3)O3（BCZT）作为模型弛豫铁电氧化物体系，La0.7Sr0.3MnO3 作为牺牲层进行演示。首先在生长晶片上定义并隔离 SrRuO3 (SRO)/BCZT/SRO 铁电电容器网格阵列，然后使用外延升离法释放这些网格阵列，并在其周围用光刻法定义蚀刻孔，最后将独立的器件阵列集成到玻璃基板上。我们提出的策略有助于制备各种独立的单晶氧化物器件，并为将它们异构集成到任意基底上铺平了道路。

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来源期刊

ACS Applied Electronic Materials Multiple-

CiteScore

7.20

自引率

4.30%

发文量

567

期刊介绍： ACS Applied Electronic Materials is an interdisciplinary journal publishing original research covering all aspects of electronic materials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials science, engineering, optics, physics, and chemistry into important applications of electronic materials. Sample research topics that span the journal's scope are inorganic, organic, ionic and polymeric materials with properties that include conducting, semiconducting, superconducting, insulating, dielectric, magnetic, optoelectronic, piezoelectric, ferroelectric and thermoelectric. Indexed/Abstracted： Web of Science SCIE Scopus CAS INSPEC Portico