Novel and practical fabrication of pre-seasoned Y2O3 ceramics through surface modification

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2024-10-01 DOI:10.1016/j.ceramint.2024.09.420

Kang-Bin Bae , Hae-Seong Jang , Se-Rin Min , Gyu-Sang Oh , Yoon-Suk Oh , In-Hwan Lee , Sung-Min Lee

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Abstract

In the semiconductor industry, the long “seasoning” time required after the installation of new ceramic components in etching equipment restricts the wafer production efficiency. This study proposes a novel and practical method for the fabrication of pre-seasoned ceramics through surface modification of Y₂O₃ ceramics. Fluorine-containing reactive vapors were produced by utilizing NH₄F as the source. Further, the formation of yttrium oxyfluoride layers on the surfaces of Y₂O₃ ceramics was demonstrated. The modified surface comprises a single-crystalline phase near the interface with the Y₂O₃ substrate. The change in the composition, crystalline nature of the modified layer, and orientation relationship with the substrate were examined via transmission electron microscopy. The kinetics of the surface modification were studied for the sintered Y₂O₃ bulk as well as for practical coatings such as plasma-sprayed or PVD coatings. The proposed surface modification approach can be used to fabricate pre-seasoned Y₂O₃ coatings, which can significantly benefit the semiconductor industry.

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通过表面改性新颖实用地制造预调质 Y2O3 陶瓷

在半导体行业，蚀刻设备安装新陶瓷元件后需要较长的 "调试 "时间，这限制了晶圆生产效率。本研究提出了一种新颖实用的方法，通过对 Y2O3 陶瓷进行表面改性来制造预调谐陶瓷。以 NH4F 为源产生含氟反应蒸汽。此外，还证明了在 Y2O3 陶瓷表面形成的氧氟化钇层。改性后的表面在与 Y2O3 基底的界面附近形成了单晶相。透射电子显微镜检查了改性层的成分变化、结晶性质以及与基底的取向关系。研究了烧结 Y2O3 块体以及等离子喷涂或 PVD 涂层等实用涂层的表面改性动力学。所提出的表面改性方法可用于制造预调谐 Y2O3 涂层，这对半导体行业大有裨益。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.