Effects of structural design on the performance of low-temperature co-fired multilayer piezoelectric ceramic actuators

IF 3.9 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Science and Engineering: B Pub Date : 2024-11-25 DOI:10.1016/j.mseb.2024.117864

Fan Yang , Shuai Fu , Qiaochao Xue , Linjin Huang , Fangfang Wang , Kang Yan

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Abstract

The multilayer piezoelectric ceramic actuator (MLCA) represents a crucial driving component for sophisticated equipment in intelligent control systems. Nevertheless, the electromechanical properties of the MLCA are challenging to comprehend due to its intricate structure. Herein, we carried a study to investigate the structure design and preparation of MLCA utilizing finite element simulation calculations and the low-temperature co-fired ceramic (LTCC) technique. The results of simulation demonstrate that the multilayer piezoelectric ceramic exhibits a nonlinear relationship between output performance and the structural dimensions of the devices. A low-cost MLCA with a large piezoelectric coefficient d₃₃ of 8172 pC/N was prepared by the LTCC technique using silver as the inner electrode. The MLCA exhibits notable micron-level displacement output characteristics in resonant mode, as demonstrated by finite element calculations and device performance characterization. This offers a promising avenue for the development of cost-effective miniaturized precision piezoelectric actuator devices.

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结构设计对低温共烧多层压电陶瓷致动器性能的影响

多层压电陶瓷致动器（MLCA）是智能控制系统中精密设备的关键驱动元件。然而，由于 MLCA 结构复杂，其机电特性的理解具有挑战性。在此，我们利用有限元模拟计算和低温共烧陶瓷（LTCC）技术对 MLCA 的结构设计和制备进行了研究。模拟结果表明，多层压电陶瓷的输出性能与器件的结构尺寸呈非线性关系。采用 LTCC 技术制备了一种低成本的多层压电陶瓷，其压电系数 d33 高达 8172 pC/N，并使用银作为内电极。通过有限元计算和器件性能表征，该 MLCA 在谐振模式下表现出显著的微米级位移输出特性。这为开发具有成本效益的微型精密压电致动器器件提供了一条前景广阔的途径。

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来源期刊

Materials Science and Engineering: B 工程技术-材料科学：综合

CiteScore

5.60

自引率

2.80%

发文量

481

审稿时长

3.5 months

期刊介绍： The journal provides an international medium for the publication of theoretical and experimental studies and reviews related to the electronic, electrochemical, ionic, magnetic, optical, and biosensing properties of solid state materials in bulk, thin film and particulate forms. Papers dealing with synthesis, processing, characterization, structure, physical properties and computational aspects of nano-crystalline, crystalline, amorphous and glassy forms of ceramics, semiconductors, layered insertion compounds, low-dimensional compounds and systems, fast-ion conductors, polymers and dielectrics are viewed as suitable for publication. Articles focused on nano-structured aspects of these advanced solid-state materials will also be considered suitable.