Near-field infrared spectroscopy: Advanced research method in thin film analysis

IF 2.4 4区物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY

Current Applied Physics Pub Date : 2024-11-16 DOI:10.1016/j.cap.2024.11.002

Jiho Kim , Boknam Chae , Sangsul Lee

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Abstract

This article introduces several cases of s-SNOM (Scattering-type scanning near-field optical microscopy) based on a SPM (Scanning probe microscopy) for chemical thin film. A highly concentrated near-field infrared performs the chemical analysis of s-SNOM at the sharp apex of the metal-coated atomic microscope tip. This attractive technique, which provides both surface morphology and chemical information of the material simultaneously, various studies have been published, including surface polariton propagation, Moire superlattice, and ballistic valley transport. Further, s-SNOM successfully visualized the formation of lamellar nanostructures of BCP and the latent image of photoresist formed by EUV (extreme ultraviolet). These results were cross-validated through traditional GIWAXS (Grazing-incidence wide-angle X-ray scattering) and FTIR (Fourier transform infrared) analysis. s-SNOM is a useful tool for providing new insights into material analysis by visualizing nanoscale chemical information of local regions that conventional measurements could not confirm.

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近场红外光谱仪：薄膜分析中的先进研究方法

本文介绍了基于扫描探针显微镜（SPM）的化学薄膜 s-SNOM（散射型扫描近场光学显微镜）的几种情况。高度集中的近场红外线可在金属涂层原子显微镜尖端的尖锐顶点对 s-SNOM 进行化学分析。这项极具吸引力的技术可同时提供材料的表面形态和化学信息，目前已发表了多项研究成果，包括表面极化子传播、莫伊尔超晶格和弹道谷传输。此外，s-SNOM 还成功地观察到了 BCP 的片状纳米结构的形成以及 EUV（极紫外线）形成的光刻胶的潜像。这些结果通过传统的 GIWAXS（Grazing-incidence wide-angle X-ray scattering）和 FTIR（Fourier transform infrared）分析进行了交叉验证。s-SNOM 是一种有用的工具，它通过可视化局部区域的纳米级化学信息，为材料分析提供了新的见解，而传统的测量方法却无法确认这些信息。

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来源期刊

Current Applied Physics 物理-材料科学：综合

CiteScore

4.80

自引率

0.00%

发文量

213

审稿时长

33 days

期刊介绍： Current Applied Physics (Curr. Appl. Phys.) is a monthly published international journal covering all the fields of applied science investigating the physics of the advanced materials for future applications. Other areas covered: Experimental and theoretical aspects of advanced materials and devices dealing with synthesis or structural chemistry, physical and electronic properties, photonics, engineering applications, and uniquely pertinent measurement or analytical techniques. Current Applied Physics, published since 2001, covers physics, chemistry and materials science, including bio-materials, with their engineering aspects. It is a truly interdisciplinary journal opening a forum for scientists of all related fields, a unique point of the journal discriminating it from other worldwide and/or Pacific Rim applied physics journals. Regular research papers, letters and review articles with contents meeting the scope of the journal will be considered for publication after peer review. The Journal is owned by the Korean Physical Society.