Integrated sensor chip of a resonant cavity light emitter and photon detector for wearable optical medicine.

Abstract

This work presents an integrated chip of a resonant cavity light emitter and photon detector (RCLEPD) to address the requirements of wearable optical medical devices for compact size, high efficiency, and interference resistance sensors. The optical radiation pattern and light extraction efficiency of the resonant cavity light emitting diode (RCLED) as well as the optical absorption spectrum of the resonant cavity enhanced photon detector (RCEPD) are theoretically simulated. Additionally, the wavelength selectivity of the RCEPD absorption spectrum is analyzed. Material epitaxial growth of RCLEPD was performed using metal-organic chemical vapor deposition (MOCVD), and an integrated sensing chip with an area of 2 × 2 mm² was fabricated. Experimental results demonstrate that RCLED achieves a maximum external quantum efficiency of 10.206%, consistent with the simulation results, while maintaining a peak wavelength at 677.5 nm within a current range of 0-20 mA. Furthermore, the RCEPD exhibits a peak response wavelength at 678 nm, matching that of the RCLED. Utilizing RCLEPD as the sensor, photoplethysmography (PPG) signals are collected from the human wrist under different RCLED driving currents resulting in an average period of 977 ms which aligns with a human pulse frequency of 61 beats/min. With further processing techniques applied to PPG signals, RCLEPD is expected to be used as a sensor in wearable blood pressure and glucose monitoring devices.