Efficient fabrication of large-scale chalcogenide glass microlens arrays via precision molding method

IF 5.1 2区材料科学 Q1 MATERIALS SCIENCE, CERAMICS

Ceramics International Pub Date : 2024-09-23 DOI:10.1016/j.ceramint.2024.09.261

Mengfei Yan , Jitao Cao , Shaopeng He , Shijun Liu , Gang Zhou , Changgui Lin , Shixun Dai , Peiqing Zhang

引用次数: 0

Abstract

Infrared microlens arrays (IR MLAs) are crucial for infrared imaging, target detection, and night vision, but creating high-quality large-scale IR MLAs is costly and challenging. This study presents a precision molding method to produce 500 × 500 microlenses on chalcogenide glass. The method involves creating concave silica molds with femtosecond laser-assisted chemical etching, which are then used to press convex MLAs onto the chalcogenide glass surface. By using single-pulse direct writing technology, a microlens array template containing 500 × 500 microlenses can be completed within 25 min. Meanwhile, the chemical etching method offers a highly efficient and low-cost way to prepare mold. The resulting MLAs exhibited smooth surfaces, uniform structures, and good imaging and focusing capabilities, indicating the effectiveness of this approach for large-scale MLA patterning and batch production.

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通过精密成型法高效制造大规模卤化玻璃微透镜阵列

红外微透镜阵列（IR MLA）对于红外成像、目标探测和夜视至关重要，但制造高质量的大规模红外微透镜阵列成本高昂且极具挑战性。本研究提出了一种在钙化玻璃上生产 500 × 500 微透镜的精密成型方法。该方法包括利用飞秒激光辅助化学蚀刻技术制作凹面二氧化硅模具，然后将凸面 MLA 压制到钙化玻璃表面。利用单脉冲直接写入技术，可在 25 分钟内完成一个包含 500 × 500 个微透镜的微透镜阵列模板。同时，化学蚀刻法提供了一种高效、低成本的模具制备方法。所制备的 MLA 表面光滑、结构均匀，并具有良好的成像和聚焦能力，这表明该方法在大规模 MLA 图形化和批量生产方面非常有效。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Ceramics International 工程技术-材料科学：硅酸盐

CiteScore

9.40

自引率

15.40%

发文量

4558

审稿时长

25 days

期刊介绍： Ceramics International covers the science of advanced ceramic materials. The journal encourages contributions that demonstrate how an understanding of the basic chemical and physical phenomena may direct materials design and stimulate ideas for new or improved processing techniques, in order to obtain materials with desired structural features and properties. Ceramics International covers oxide and non-oxide ceramics, functional glasses, glass ceramics, amorphous inorganic non-metallic materials (and their combinations with metal and organic materials), in the form of particulates, dense or porous bodies, thin/thick films and laminated, graded and composite structures. Process related topics such as ceramic-ceramic joints or joining ceramics with dissimilar materials, as well as surface finishing and conditioning are also covered. Besides traditional processing techniques, manufacturing routes of interest include innovative procedures benefiting from externally applied stresses, electromagnetic fields and energetic beams, as well as top-down and self-assembly nanotechnology approaches. In addition, the journal welcomes submissions on bio-inspired and bio-enabled materials designs, experimentally validated multi scale modelling and simulation for materials design, and the use of the most advanced chemical and physical characterization techniques of structure, properties and behaviour. Technologically relevant low-dimensional systems are a particular focus of Ceramics International. These include 0, 1 and 2-D nanomaterials (also covering CNTs, graphene and related materials, and diamond-like carbons), their nanocomposites, as well as nano-hybrids and hierarchical multifunctional nanostructures that might integrate molecular, biological and electronic components.