Reliable and high-performance Ag-doped MoSi2 film with enhanced mechanical and tribological properties

Abstract

The Mo-Ag-Si solid solution film was prepared using magnetron sputtering to enhance hardness and toughness while reducing friction and wear. Compared with the pure MoSi₂ film, the Mo-Ag-Si solid solution film exhibited a 25.69 % increase in hardness, a 5.17 % increase in the H/E ratio, and a 33.33 % boost in the H³/E² ratio. Tribological tests revealed that Ag atoms formed a self-lubricating AgMo_xO_y phase, reducing the friction coefficient to 0.09 and the wear rate to 3.89 × 10⁻⁷ mm³ /N·m over 565 m. First-principle calculations indicate that the Mo-Ag-Si solid solution film exhibited better mechanical and tribological properties than the pure MoSi₂ film. These findings provide another approach for developing reliable MoSi₂ films with high performance.