All-dielectric transmissive narrow-band filters adjustable within wide spectral range

Abstract

The challenge of obtaining transmission spectra with both a wider tunable spectral range and high resolution persists. In this paper, a novel all-dielectric transmissive grating structure based on Mie resonance is proposed. The structure excites the Mie resonance by embedding a high refractive index contrast grating in a KF-Si film system band-stop filter. The dipole resonance energy is confined within the high refractive index silicon grating material, expanding the cutoff bandwidth of the KF-Si film system to over 400 nm and achieving single-peak transmission in the visible range. And the continuous transmission spectrum has an adjustable range of 300 nm with the highest spectral resolution (FWHM) (∼20 nm) can be achieved by adjusting the grating period. To suppress the coupling energy excitation between the higher-order magnetic dipole and the substrate, a silicon-rich nitride (SRN) matching layer is introduced between the KF-Si film system and the substrate. This layer enhances the intensity of the resonance peaks while simultaneously suppressing the short-wavelength sidebands, thereby improving the saturation and purity of the spectrum. In addition, we obtained a large angular tolerance of up to 15° by stacking the silicon film system. This work is of great significance for the advancement of hyperspectral imaging and display technology.