Integrated electro-optic modulator on a lead zirconate titanate-silicon nitride heterogeneous platform.

IF 3.1 2区 物理与天体物理 Q2 OPTICS
Optics letters Pub Date : 2024-11-15 DOI:10.1364/OL.538022
Wenfeng Zhou, Yong Zhang, Yongheng Jiang, Pu Zhang, Jian Shen, Xun Zhang, Yuqi Chen, Min Sun, Feng Qiu, Huifu Xiao, Yonghui Tian, Yikai Su
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Abstract

Integrated electro-optic (EO) modulators are the core components of the optoelectronic information technology, and lithium niobate is currently the most widely used crystalline thin film material; however, finite EO coefficients limit the modulation efficiency of the modulators. In this Letter, we present an integrated EO modulator using a microring resonator on the lead zirconate titanate (PZT) and silicon nitride (SiN) heterogeneous platform. The microwave attenuation is reduced by using low loss tangent and dielectric constant SiN as the electrode substrate, achieving an EO bandwidth of 33 GHz. Thanks to the high quality of the PZT film deposition and the substantial EO overlap of our structure, ultrahigh modulation efficiency with the half-wave voltage-length product of 0.7 V·cm is achieved. In addition, as a remarkable result, an 80-Gbps on-off keying signal is generated using the modulator.

锆钛酸铅-氮化硅异质平台上的集成电光调制器。
集成电光(EO)调制器是光电信息技术的核心部件,而铌酸锂是目前应用最广泛的晶体薄膜材料;然而,有限的 EO 系数限制了调制器的调制效率。在这封信中,我们介绍了一种在锆钛酸铅(PZT)和氮化硅(SiN)异质平台上使用微波谐振器的集成环氧乙烷调制器。通过使用低损耗切线和介电常数的氮化硅作为电极基板,降低了微波衰减,实现了 33 GHz 的环氧乙烷带宽。得益于高质量的 PZT 薄膜沉积和我们结构的大量 EO 重叠,我们实现了超高的调制效率,半波电压-长度乘积为 0.7 V-cm。此外,该调制器还产生了 80-Gbps 的开关键控信号,这是一项了不起的成果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Optics letters
Optics letters 物理-光学
CiteScore
6.60
自引率
8.30%
发文量
2275
审稿时长
1.7 months
期刊介绍: The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community. Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
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