AC Bridge Pressure Sensor With Temperature Compensation for High Temperature and Pressure Composite Environment

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2024-10-11 DOI:10.1109/JSEN.2024.3475211

Boshan Sun;Jijun Xiong;Yingping Hong;Wenping Zhang;Kun Bi;Miaomiao Zheng;Chen Li

{"title":"AC Bridge Pressure Sensor With Temperature Compensation for High Temperature and Pressure Composite Environment","authors":"Boshan Sun;Jijun Xiong;Yingping Hong;Wenping Zhang;Kun Bi;Miaomiao Zheng;Chen Li","doi":"10.1109/JSEN.2024.3475211","DOIUrl":null,"url":null,"abstract":"In this article, a high-temperature resistant ac bridge pressure sensor is designed for the application of high temperature and pressure combined environment. The temperature drift error compensation of the pressure sensor is realized by designing and arranging the structure of temperature-sensitive and pressure-sensitive capacitors connected with the bridge. In particular, the sensor alumina ceramic substrate is prepared by the lamination postsintering process of green tapes, and the silver paste is tightly integrated on the alumina ceramic surface by the inkjet printing postsintering process. Among them, the high-temperature and pressure-sensitive compact cavity is formed by the creative carbon film filling process before the multilayer green tapes lamination. Finally, three sets of high temperature and temperature-pressure composite test platforms were built and the comprehensive performance of the sensor was tested. The results show that the sensor can work at a high temperature of not less than \n<inline-formula> <tex-math>$700~^{\\circ }$ </tex-math></inline-formula>\nC and can complete the combined high temperature and high pressure test at a high temperature of \n<inline-formula> <tex-math>$23~^{\\circ }$ </tex-math></inline-formula>\nC–\n<inline-formula> <tex-math>$400~^{\\circ }$ </tex-math></inline-formula>\nC, in which the test error at \n<inline-formula> <tex-math>$400~^{\\circ }$ </tex-math></inline-formula>\nC is less than 3.3%.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"24 22","pages":"36579-36586"},"PeriodicalIF":4.3000,"publicationDate":"2024-10-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10715490/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

Abstract

In this article, a high-temperature resistant ac bridge pressure sensor is designed for the application of high temperature and pressure combined environment. The temperature drift error compensation of the pressure sensor is realized by designing and arranging the structure of temperature-sensitive and pressure-sensitive capacitors connected with the bridge. In particular, the sensor alumina ceramic substrate is prepared by the lamination postsintering process of green tapes, and the silver paste is tightly integrated on the alumina ceramic surface by the inkjet printing postsintering process. Among them, the high-temperature and pressure-sensitive compact cavity is formed by the creative carbon film filling process before the multilayer green tapes lamination. Finally, three sets of high temperature and temperature-pressure composite test platforms were built and the comprehensive performance of the sensor was tested. The results show that the sensor can work at a high temperature of not less than

$700~^{\circ }$

C and can complete the combined high temperature and high pressure test at a high temperature of

$23~^{\circ }$

C–

$400~^{\circ }$

C, in which the test error at

$400~^{\circ }$

C is less than 3.3%.

查看原文本刊更多论文

带温度补偿的交流电桥压力传感器，适用于高温高压复合环境

本文设计了一种耐高温交流电桥压力传感器，用于高温和高压组合环境的应用。通过设计和布置与电桥相连的温敏电容和压敏电容的结构，实现了压力传感器的温漂误差补偿。其中，传感器的氧化铝陶瓷基板采用绿色胶带层压后烧结工艺制备，银浆采用喷墨打印后烧结工艺紧密结合在氧化铝陶瓷表面。其中，在多层绿色胶带层压之前，通过创造性的碳膜填充工艺形成高温压敏致密腔体。最后，搭建了三套高温、温压复合试验平台，对传感器的综合性能进行了测试。结果表明，传感器能在不低于 700~^{\circ }$ C 的高温下工作，并能在 23~^{\circ }$ C- 400~^{\circ }$ C 的高温下完成高温高压复合测试，其中在 400~^{\circ }$ C 时的测试误差小于 3.3%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice