Fabrication and electroadhesion properties of parylene-coated carbon fiber arrays.

IF 3.1 3区计算机科学 Q1 ENGINEERING, MULTIDISCIPLINARY

Bioinspiration & Biomimetics Pub Date : 2024-11-08 DOI:10.1088/1748-3190/ad8c88

Lan Ai, Tingting Liu, Mingmin Zai, Lizhen Hou, Shiliang Wang

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Abstract

Parylene-coated carbon fiber (CF) arrays with tunable inclination angles and heights were fabricated using oxygen plasma etching of composite wafers with embedded parallel CFs, followed by parylene coating via chemical vapor deposition. The effective elastic modulus of the CF arrays was found to decrease approximately in proportion to the square of the fiber length (5-60μm), with the parylene coating (∼2μm) further slightly reducing the modulus. Both experimental measurements and finite element simulations indicated that CF arrays with inclination angles below 75° exhibit ideal contact with glass wafers during electrostatic adhesion. However, the measured electrostatic adhesion between CF arrays and A4 paper was significantly lower than the predicted value for ideal contact, likely due to the porous nature of the paper. Electrostatic chuck prototypes based on the parylene-coated CF arrays demonstrated effective pick-and-place capabilities for A4 paper, plastic films, and glass wafers at voltages ranging from 500 to 900 V, without causing surface damage or leaving residue. These results highlight the potential of the parylene-coated CF arrays for applications in high-precision manufacturing and automated handling systems.

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聚对苯二甲酸丁二酯涂层碳纤维阵列的制造和电粘附特性。

利用氧等离子体蚀刻嵌入平行碳纤维的复合晶片，然后通过化学气相沉积进行对二甲苯涂层，制造出了具有可调倾角和高度的对二甲苯涂层碳纤维（CF）阵列。研究发现，CF 阵列的有效弹性模量与纤维长度（5-60μm）的平方成正比，而对二甲苯涂层（∼2μm）则进一步略微降低了模量。实验测量和有限元模拟都表明，倾斜角低于 75° 的 CF 阵列在静电粘附过程中与玻璃晶片的接触非常理想。然而，CF 阵列与 A4 纸之间的实测静电粘附力明显低于理想接触的预测值，这可能是由于纸张的多孔性造成的。基于对二甲苯涂层 CF 阵列的静电吸盘原型在 500 到 900 V 的电压范围内对 A4 纸、塑料薄膜和玻璃晶片表现出了有效的拾放能力，且不会造成表面损坏或残留。这些结果凸显了聚对二甲苯涂层 CF 阵列在高精度制造和自动处理系统中的应用潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Bioinspiration & Biomimetics 工程技术-材料科学：生物材料

CiteScore

5.90

自引率

14.70%

发文量

132

审稿时长

3 months

期刊介绍： Bioinspiration & Biomimetics publishes research involving the study and distillation of principles and functions found in biological systems that have been developed through evolution, and application of this knowledge to produce novel and exciting basic technologies and new approaches to solving scientific problems. It provides a forum for interdisciplinary research which acts as a pipeline, facilitating the two-way flow of ideas and understanding between the extensive bodies of knowledge of the different disciplines. It has two principal aims: to draw on biology to enrich engineering and to draw from engineering to enrich biology. The journal aims to include input from across all intersecting areas of both fields. In biology, this would include work in all fields from physiology to ecology, with either zoological or botanical focus. In engineering, this would include both design and practical application of biomimetic or bioinspired devices and systems. Typical areas of interest include: Systems, designs and structure Communication and navigation Cooperative behaviour Self-organizing biological systems Self-healing and self-assembly Aerial locomotion and aerospace applications of biomimetics Biomorphic surface and subsurface systems Marine dynamics: swimming and underwater dynamics Applications of novel materials Biomechanics; including movement, locomotion, fluidics Cellular behaviour Sensors and senses Biomimetic or bioinformed approaches to geological exploration.