Influence of the Carrier Gas Flow in the CVD Synthesis of 2-Dimensional MoS₂ Based on the Spin-Coating of Liquid Molybdenum Precursors.

IF 4.4 3区材料科学 Q2 CHEMISTRY, MULTIDISCIPLINARY

Nanomaterials Pub Date : 2024-10-31 DOI:10.3390/nano14211749

Fiorenza Esposito, Matteo Bosi, Giovanni Attolini, Francesca Rossi, Roberto Fornari, Filippo Fabbri, Luca Seravalli

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引用次数: 0

Abstract

Atomically thin molybdenum disulfide (MoS₂) is a two-dimensional semiconductor with versatile applications. The recent adoption of liquid molybdenum precursors in chemical vapor deposition has contributed significantly to the reproducible wafer-scale synthesis of MoS₂ monolayer and few-layer films. In this work, we study the effects of the carrier gas flow rate on the properties of two-dimensional molybdenum disulfide grown by liquid-precursor-intermediate chemical vapor deposition on SiO₂/Si substrates. We characterized the samples using Optical Microscopy, Scanning Electron Microscopy, Raman spectroscopy, and Photoluminescence spectroscopy. We analyzed samples grown with different nitrogen carrier flows, ranging from 150 to 300 sccm, and discussed the effect of carrier gas flows on their properties. We found a correlation between MoS₂ flake lateral size, shape, and number of layers, and we present a qualitative growth model based on changes in sulfur provision caused by different carrier flows. We show how the use of liquid precursors can allow for the synthesis of homogeneous, single-layer flakes up to 100 µm in lateral size by optimizing the gas flow rate. These results are essential for gaining a deeper understanding of the growth process of MoS₂.

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载气流量对基于液态钼前驱体自旋涂层的二维 MoS2 CVD 合成的影响。

原子级二硫化钼（MoS2）是一种应用广泛的二维半导体。最近在化学气相沉积中采用液态钼前驱体，大大促进了单层和少层 MoS2 薄膜的晶圆级可重复合成。在这项工作中，我们研究了载气流速对通过液态前驱体-中间体化学气相沉积法在二氧化硅/硅基底上生长的二维二硫化钼特性的影响。我们使用光学显微镜、扫描电子显微镜、拉曼光谱和光致发光光谱对样品进行了表征。我们分析了使用不同氮气载流（从 150 到 300 sccm）生长的样品，并讨论了载气流量对其特性的影响。我们发现了 MoS2 薄片的横向尺寸、形状和层数之间的相关性，并根据不同载气流引起的硫供应变化提出了一个定性生长模型。我们展示了如何通过优化气体流速，使用液体前驱体合成横向尺寸高达 100 微米的均匀单层薄片。这些结果对于深入了解 MoS2 的生长过程至关重要。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nanomaterials NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

8.50

自引率

9.40%

发文量

3841

审稿时长

14.22 days

期刊介绍： Nanomaterials (ISSN 2076-4991) is an international and interdisciplinary scholarly open access journal. It publishes reviews, regular research papers, communications, and short notes that are relevant to any field of study that involves nanomaterials, with respect to their science and application. Thus, theoretical and experimental articles will be accepted, along with articles that deal with the synthesis and use of nanomaterials. Articles that synthesize information from multiple fields, and which place discoveries within a broader context, will be preferred. There is no restriction on the length of the papers. Our aim is to encourage scientists to publish their experimental and theoretical research in as much detail as possible. Full experimental or methodical details, or both, must be provided for research articles. Computed data or files regarding the full details of the experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material. Nanomaterials is dedicated to a high scientific standard. All manuscripts undergo a rigorous reviewing process and decisions are based on the recommendations of independent reviewers.