{"title":"Biomimetic hair-assisted GaN optical devices for bidirectional airflow detection.","authors":"Tianyu Ye, Jian Chen, Xinke Tang, Kwai Hei Li","doi":"10.1038/s41378-024-00794-2","DOIUrl":null,"url":null,"abstract":"<p><p>Airflow sensing plays a pivotal role in numerous fields, including medicine, industry, and environmental monitoring. However, detecting bidirectional airflow using a single sensing unit poses significant challenges. In this work, a miniature airflow sensing device is introduced, utilizing a GaN optical chip integrated with a biomimetic hair structure. The sensing device comprises a monolithic GaN chip that handles both light emission and detection. The biomimetic hairs, constructed from nylon fibers and PDMS film, undergo structural bending in converting airflow signals into optical changes, modulating the light captured by the on-chip detector. The intensity of the airflow directly correlates with the bending extent of the biomimetic hair, facilitating the precise detection of airflow rates through changes in the photocurrent. The integrated device can measure a wide range of airflow rates from -23.87 ms<sup>-1</sup> to 21.29 ms<sup>-1</sup>, and exhibit a rapid response time of 13 ms and a detection limit of 0.1 ms<sup>-1</sup>. Characterized by its compact size, fast response time, and bidirectional detection ability, the developed device holds immense potential for applications in breath detection, speech recognition, encoding information, and the realization of logic operations.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":"10 1","pages":"166"},"PeriodicalIF":7.3000,"publicationDate":"2024-11-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11544249/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-024-00794-2","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
引用次数: 0
Abstract
Airflow sensing plays a pivotal role in numerous fields, including medicine, industry, and environmental monitoring. However, detecting bidirectional airflow using a single sensing unit poses significant challenges. In this work, a miniature airflow sensing device is introduced, utilizing a GaN optical chip integrated with a biomimetic hair structure. The sensing device comprises a monolithic GaN chip that handles both light emission and detection. The biomimetic hairs, constructed from nylon fibers and PDMS film, undergo structural bending in converting airflow signals into optical changes, modulating the light captured by the on-chip detector. The intensity of the airflow directly correlates with the bending extent of the biomimetic hair, facilitating the precise detection of airflow rates through changes in the photocurrent. The integrated device can measure a wide range of airflow rates from -23.87 ms-1 to 21.29 ms-1, and exhibit a rapid response time of 13 ms and a detection limit of 0.1 ms-1. Characterized by its compact size, fast response time, and bidirectional detection ability, the developed device holds immense potential for applications in breath detection, speech recognition, encoding information, and the realization of logic operations.
期刊介绍:
Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.