Aluminium surface work hardening enables multi-scale 3D lithography

IF 8.9 2区 环境科学与生态学 Q1 ENGINEERING, ENVIRONMENTAL
Lang Wang, Hangtong Li, Chen Zhao, Liqiang Zhang, Jiye Li, Salah Ud Din, Zichen Wang, Jiacheng Sun, Sergio Andres Galindo Torres, Zhiyong Fan, Liaoyong Wen
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Abstract

Multi-scale structures are ubiquitous in biological systems. However, manufacturing man-made structures with controllable features spanning multiple length scales, particularly down to nanoscale features, is very challenging, which seriously impacts their collective properties. Here we introduce an aluminium-based three-dimensional lithography that combines sequential nano–micro–macro-imprinting and anodization of multi-scale anodic aluminium oxide templates to manufacture well-defined multi-scale structures, using various materials. The high-fidelity nano-patterns and micro-patterns were facilitated by the surface work hardening phenomenon, where the nano-patterns can be further fine-tailored by anodization to have high-aspect-ratio and tunable nano-holes. Based on the aluminium-based three-dimensional lithography, multi-scale materials across length scales of at least 107 orders of magnitude were precisely fabricated, including carbon, semiconductors and metals. We integrated pressure sensors and biosensors with superior and customizable performances by tailoring the multi-scale carbon networks on different length scales from nanofibres and micropyramids to macrodome arrays. This work provides a versatile technique for prototyping on-demand multi-scale structures and materials to explore desirable mechanical and physical properties.

Abstract Image

通过铝表面加工硬化实现多尺度 3D 光刻技术
多尺度结构在生物系统中无处不在。然而,制造具有跨越多个长度尺度的可控特征(尤其是纳米级特征)的人造结构非常具有挑战性,这严重影响了它们的集体特性。在此,我们介绍一种铝基三维光刻技术,该技术结合了多尺度阳极氧化铝模板的连续纳米-微米-宏观压印和阳极氧化,利用各种材料制造出定义明确的多尺度结构。表面加工硬化现象促进了高保真纳米图案和微图案的形成,纳米图案可通过阳极氧化进一步微调,以形成高宽比和可调的纳米孔。在铝基三维光刻技术的基础上,我们精确地制造出了长度尺度至少为 107 数量级的多尺度材料,包括碳、半导体和金属。我们通过定制不同长度尺度的多尺度碳网络(从纳米纤维、微金字塔到大圆顶阵列),集成了性能优越且可定制的压力传感器和生物传感器。这项工作为按需制作多尺度结构和材料原型以探索理想的机械和物理特性提供了一种通用技术。
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来源期刊
Environmental Science & Technology Letters Environ.
Environmental Science & Technology Letters Environ. ENGINEERING, ENVIRONMENTALENVIRONMENTAL SC-ENVIRONMENTAL SCIENCES
CiteScore
17.90
自引率
3.70%
发文量
163
期刊介绍: Environmental Science & Technology Letters serves as an international forum for brief communications on experimental or theoretical results of exceptional timeliness in all aspects of environmental science, both pure and applied. Published as soon as accepted, these communications are summarized in monthly issues. Additionally, the journal features short reviews on emerging topics in environmental science and technology.
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