Magnetron sputtered transition-metal-nitrides thin films as electrode materials for supercapacitors: A review

Abstract

Transition-metal-nitrides (TMNs) thin films are now in the spotlight as electrode materials for supercapacitors, which have attracted considerable attention due to excellent conductivity and remarkable physicochemical properties. There are already some informative reviews on the latest developments in TMNs-based electrodes for supercapacitors, however, which concentrated on the advances in TMNs prepared by different synthesis methods for supercapacitor applications. The magnetron sputtered TMNs thin films acted as electrodes for supercapacitors, in principle, have significant advantages over those by other synthesis methods in term of simple adjustability, environmental friendliness, and high efficiency. This review mainly presents the recent progress of magnetron sputtered TMNs thin films as electrode materials for supercapacitors. Firstly, the working principle and charge mechanism of a supercapacitor, the types, properties, and preparation methods of electrode materials in supercapacitors, and the equipment and principle of magnetron sputtering are briefly discussed. Secondly, the recent progress of magnetron sputtered TMNs films as electrodes for supercapacitors are reviewed. Finally, the current challenges and future directions of magnetron sputtered TMNs thin films for supercapacitors are also concisely proposed.