A binary gas concentration and flow rate measurement system based on scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers

IF 2.3 3区工程技术 Q2 ENGINEERING, MECHANICAL

Flow Measurement and Instrumentation Pub Date : 2024-10-28 DOI:10.1016/j.flowmeasinst.2024.102724

Hanzhe Liu , Yuzhe Lin , Guoqiang Wu , Jifang Tao

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引用次数: 0

Abstract

This paper presents an ultrasonic binary gas concentration and flow rate measurement system (UBCFS) based on a scandium-doped aluminum nitride (Sc

0.2

0.8

N) piezoelectric micromachined ultrasonic transducer (PMUT) array, enabling the simultaneous measurement of binary gas concentration and flow rate. The ultrasonic propagation time method is employed to determine binary gas concentration and flow rate. To assess the feasibility of the proposed UBCFS, it is integrated into an experimental setup composed of nitrogen (N₂) and argon (Ar) gas paths. Results indicate that the reported UBCFS measures both gas concentration and flow rate with high accuracy and repeatability. For binary gas flow rate measurements, the mean error and repeatability error are below 0.403% and 0.667%, respectively, across all binary gas concentrations. Within the concentration range of 0% to 100%, the minimum mean error and repeatability error for concentration measurements are 0.03% and 0.04%, respectively, which is almost unaffected by gas flow rate. The performance of the proposed UBCFS based on PMUT arrays surpasses that of most reported or commercialized devices. The compact, cost-effective, and highly reliable UBCFS provides a feasible solution for portable equipment utilized in binary gas detection and control in semiconductor processing.

查看原文本刊更多论文

基于掺钪氮化铝压电微机械超声换能器的二元气体浓度和流速测量系统

本文介绍了一种基于掺钪氮化铝（Sc0.2Al0.8N）压电微机械超声换能器（PMUT）阵列的超声波二元气体浓度和流速测量系统（UBCFS），可同时测量二元气体浓度和流速。采用超声波传播时间法测定二元气体浓度和流速。为了评估所提出的 UBCFS 的可行性，将其集成到了一个由氮气（N2）和氩气（Ar）气路组成的实验装置中。结果表明，所报告的 UBCFS 测量气体浓度和流速的准确性和可重复性都很高。在二元气体流速测量中，所有二元气体浓度的平均误差和重复性误差分别低于 0.403% 和 0.667%。在 0% 至 100% 的浓度范围内，浓度测量的最小平均误差和重复性误差分别为 0.03% 和 0.04%，几乎不受气体流速的影响。基于 PMUT 阵列的 UBCFS 性能超过了大多数已报道或商业化的设备。UBCFS 结构紧凑、成本低廉、可靠性高，为半导体加工过程中二元气体检测和控制所使用的便携式设备提供了可行的解决方案。

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来源期刊

Flow Measurement and Instrumentation 工程技术-工程：机械

CiteScore

4.30

自引率

13.60%

发文量

123

审稿时长

6 months

期刊介绍： Flow Measurement and Instrumentation is dedicated to disseminating the latest research results on all aspects of flow measurement, in both closed conduits and open channels. The design of flow measurement systems involves a wide variety of multidisciplinary activities including modelling the flow sensor, the fluid flow and the sensor/fluid interactions through the use of computation techniques; the development of advanced transducer systems and their associated signal processing and the laboratory and field assessment of the overall system under ideal and disturbed conditions. FMI is the essential forum for critical information exchange, and contributions are particularly encouraged in the following areas of interest: Modelling: the application of mathematical and computational modelling to the interaction of fluid dynamics with flowmeters, including flowmeter behaviour, improved flowmeter design and installation problems. Application of CAD/CAE techniques to flowmeter modelling are eligible. Design and development: the detailed design of the flowmeter head and/or signal processing aspects of novel flowmeters. Emphasis is given to papers identifying new sensor configurations, multisensor flow measurement systems, non-intrusive flow metering techniques and the application of microelectronic techniques in smart or intelligent systems. Calibration techniques: including descriptions of new or existing calibration facilities and techniques, calibration data from different flowmeter types, and calibration intercomparison data from different laboratories. Installation effect data: dealing with the effects of non-ideal flow conditions on flowmeters. Papers combining a theoretical understanding of flowmeter behaviour with experimental work are particularly welcome.