Effect of surface integrity on quality factor of hemispherical resonator

IF 7.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

International Journal of Mechanical Sciences Pub Date : 2024-10-29 DOI:10.1016/j.ijmecsci.2024.109797

Chuanzhen Ma , Henan Liu , Mingjun Chen , Jian Cheng , Jinchuan Tian , Biao Qin , Jiangang Sun , Zihan Zhou , Jingyang Guo

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Abstract

Since hemispherical resonator (HSR) is core component of hemispherical resonator gyro (HRG), the surface integrity directly determines performance parameters of HSR, which then affects the working accuracy and service life of HRG. Therefore, it is necessary to investigate the effect of surface integrity on quality factor of HSR. This work focuses on the surface integrity evolution of fused silica HSR machined by the multi-energy field coupled magnetorheological polishing (MEMRP) and the influence of surface integrity on quality factor. Firstly, the mechanism of removing subsurface damage and surface morphology evolution of the fused silica component machined by MEMRP were investigated to reveal the surface quality evolution rules. It was found that the removal of subsurface damage in fused silica components can be divided into three zones: rapid improvement zone, slow improvement zone, and gentle improvement zone. The improvement of surface roughness is slow in the gentle improvement zone, and the nonlinear regression model between subsurface damage depth and surface roughness is proposed. Then, the surface structure evolution and the mechanical characteristics of the surface layer of fused silica components during the MEMRP process was systematically analyzed. It was found that the initial polishing stage significantly improved the surface mechanical performance parameters. Finally, the quality factor of HSR with various surface qualities was measured. The results show that the subsurface damage depth and quality factor exhibit nonlinear relationship and the crack surface layer has a significant impact on the quality factor. Completely removing the subsurface damage, quality factor of HSR with diameter of 20 mm increased from hundreds of thousands to 2.01×10⁷, and the uniformity of quality factor is 1.2 %. This work could offer theoretical guidance and parameter basis for quickly removing subsurface damage and achieving high-performance manufacturing of fused silica HSR.

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表面完整性对半球形谐振器品质因数的影响

半球谐振器（HSR）是半球谐振器陀螺（HRG）的核心部件，其表面完整性直接决定了 HSR 的性能参数，进而影响 HRG 的工作精度和使用寿命。因此，有必要研究表面完整性对 HSR 质量因子的影响。本研究主要探讨了多能场耦合磁流变抛光（MEMRP）加工的熔融石英 HSR 的表面完整性演变以及表面完整性对质量因子的影响。首先，研究了多能场耦合磁流变抛光（MEMRP）加工的熔融石英部件表面损伤去除机理和表面形貌演变，揭示了表面质量演变规律。研究发现，熔融石英部件表面下损伤的去除可分为三个区域：快速改善区、缓慢改善区和温和改善区。在缓和改善区，表面粗糙度的改善速度较慢，并提出了次表层损伤深度与表面粗糙度之间的非线性回归模型。然后，系统分析了 MEMRP 过程中熔融石英元件表面结构的演变和表面层的力学特性。结果发现，初始抛光阶段能显著改善表面机械性能参数。最后，测量了具有不同表面质量的 HSR 的质量因子。结果表明，表层下损伤深度与质量因子呈非线性关系，裂纹表层对质量因子有显著影响。完全去除表层下损伤后，直径为 20 mm 的 HSR 的品质因数从几十万增加到 2.01×107，品质因数的均匀性为 1.2%。这项工作可为快速消除次表面损伤、实现高性能熔融石英 HSR 制造提供理论指导和参数依据。

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来源期刊

International Journal of Mechanical Sciences 工程技术-工程：机械

CiteScore

12.80

自引率

17.80%

发文量

769

审稿时长

19 days

期刊介绍： The International Journal of Mechanical Sciences (IJMS) serves as a global platform for the publication and dissemination of original research that contributes to a deeper scientific understanding of the fundamental disciplines within mechanical, civil, and material engineering. The primary focus of IJMS is to showcase innovative and ground-breaking work that utilizes analytical and computational modeling techniques, such as Finite Element Method (FEM), Boundary Element Method (BEM), and mesh-free methods, among others. These modeling methods are applied to diverse fields including rigid-body mechanics (e.g., dynamics, vibration, stability), structural mechanics, metal forming, advanced materials (e.g., metals, composites, cellular, smart) behavior and applications, impact mechanics, strain localization, and other nonlinear effects (e.g., large deflections, plasticity, fracture). Additionally, IJMS covers the realms of fluid mechanics (both external and internal flows), tribology, thermodynamics, and materials processing. These subjects collectively form the core of the journal's content. In summary, IJMS provides a prestigious platform for researchers to present their original contributions, shedding light on analytical and computational modeling methods in various areas of mechanical engineering, as well as exploring the behavior and application of advanced materials, fluid mechanics, thermodynamics, and materials processing.