A Wollaston Prism and Corner Cube Reflector Cooperative Sensing Heterodyne Interferometer for Simultaneous Measurement of Straightness Errors and Displacement

IF 5.6 2区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Instrumentation and Measurement Pub Date : 2024-10-16 DOI:10.1109/TIM.2024.3481550

Liping Yan;Yu Chen;Yingtian Lou;Jiandong Xie;Benyong Chen

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引用次数: 0

Abstract

In this study, a novel Wollaston prism (WP) and retroreflector (RR) cooperative sensing heterodyne interferometer (CSHI) for simultaneous measurement of straightness errors and displacement is proposed. In this CSHI, a WP, a corner cube reflector (CCR), and a beam splitter are assembled together to act as the sensor for straightness errors and displacement measurements. Thanks to this ingenious design, the return direction of the straightness and displacement measurement beams does not change with the rotation of the measured object, thereby increasing the linear measurement range from a few hundred millimeters to several meters. Therefore, the proposed CSHI can not only achieve the simultaneous measurement of the straightness errors and displacement but also make the straightness error measurement unaffected by the rotation error of the measured object. In addition, the influence of horizontal straightness error on displacement measurement is analyzed and validated. The optical configuration of the proposed CSHI is described in detail. An experimental setup was constructed and a series of experiments were carried out to verify the feasibility and effectiveness of the CSHI. The experimental results showed that within a range of 4 m, the standard deviations (SDs) of the vertical straightness error and displacement measurement results between the proposed CSHI and a commercial interferometer achieved 0.12 and

$0.11~\mu $

m/m, respectively. Thus, the proposed CSHI has a great potential in industrial applications such as the ultraprecision machine-tool control, precision motion stage testing, and displacement sensor calibration.

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同时测量直线度误差和位移的沃拉斯顿棱镜和角立方反射镜合作传感异频干涉仪

本研究提出了一种新型的沃拉斯顿棱镜（WP）和逆反射器（RR）协同传感外差干涉仪（CSHI），用于同时测量直线度误差和位移。在这种 CSHI 中，WP、角立方反射镜 (CCR) 和分光镜组装在一起，作为直线度误差和位移测量的传感器。由于设计巧妙，直线度和位移测量光束的返回方向不会随被测物体的旋转而改变，从而将线性测量范围从几百毫米扩大到几米。因此，所提出的 CSHI 不仅可以实现直线度误差和位移的同步测量，还可以使直线度误差测量不受被测物体旋转误差的影响。此外，还分析并验证了水平直线度误差对位移测量的影响。详细介绍了拟议 CSHI 的光学配置。为了验证 CSHI 的可行性和有效性，构建了实验装置并进行了一系列实验。实验结果表明，在 4 米范围内，拟议的 CSHI 与商用干涉仪之间的垂直直线度误差和位移测量结果的标准偏差（SDs）分别为 0.12 和 0.11 美元~\mu $ m/m。因此，拟议的 CSHI 在超精密机床控制、精密运动平台测试和位移传感器校准等工业应用中具有巨大潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

IEEE Transactions on Instrumentation and Measurement 工程技术-工程：电子与电气

CiteScore

9.00

自引率

23.20%

发文量

1294

审稿时长

3.9 months

期刊介绍： Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.