Absolute detection method based on multi-signal phase extraction and separation

Abstract

The development of optical systems requires high-precision inspection technology, which supports the manufacturing and integration of optical systems. Currently, the method commonly used for high-precision optical plane inspection is interferometry based on the reference plane, however, its inspection accuracy is constrained by the accuracy of the reference plane. Therefore, this paper proposes an absolute detection method based on multi-signal phase extraction, which simplifies the detection process and effectively improves the detection accuracy. Firstly, the method detects the planes by utilizing the rotational translation method, secondly, the multi-surface separation technique is utilized to extract and separate the face shapes of the three surfaces in the rotational translation method, and lastly, the reference plane error is calibrated and excluded from the measurement results to accurately obtain the surface morphology of the component under test. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods.