Propagation of leaky surface acoustic waves in a layered piezoelectric semiconductor structure

IF 5.7 1区工程技术 Q1 ENGINEERING, CIVIL

Thin-Walled Structures Pub Date : 2024-10-18 DOI:10.1016/j.tws.2024.112601

Yuyang Zou, Qingguo Xia, Menghui Xu, Jia Lou, Minghua Zhang, Jianke Du

{"title":"Propagation of leaky surface acoustic waves in a layered piezoelectric semiconductor structure","authors":"Yuyang Zou, Qingguo Xia, Menghui Xu, Jia Lou, Minghua Zhang, Jianke Du","doi":"10.1016/j.tws.2024.112601","DOIUrl":null,"url":null,"abstract":"<div><div>Some piezoelectric materials, such as ZnO and AlN, have not only piezoelectric properties but also semiconductor property. In this paper, an analytical solution of the leaky surface acoustic waves (LSAW) is developed for the structure composed of piezoelectric substrate boned with piezoelectric semiconductor (PSC) film using the partial wave method. Furthermore, the dispersion, loss, and attenuation curves of the LSAW in the composite structure have been obtained by combining the boundary conditions at the top of the film and the continuity conditions on the interface between the film and the substrate. Numerical examples illustrate the effects of PSC film thickness-to-wavelength ratio, steady-state carrier concentration, and biasing electric field on the dispersion, loss, and attenuation curves of LSAW in AlN film/LiNbO<sub>3</sub> substrate. In addition, we conducted simulation by means of the PDE module in COMSOL. The theoretical results are consistent with the simulations, which could be helpful for the design of surface acoustic wave devices based on PSC materials.</div></div>","PeriodicalId":49435,"journal":{"name":"Thin-Walled Structures","volume":"205 ","pages":"Article 112601"},"PeriodicalIF":5.7000,"publicationDate":"2024-10-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Thin-Walled Structures","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0263823124010413","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, CIVIL","Score":null,"Total":0}

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Abstract

Some piezoelectric materials, such as ZnO and AlN, have not only piezoelectric properties but also semiconductor property. In this paper, an analytical solution of the leaky surface acoustic waves (LSAW) is developed for the structure composed of piezoelectric substrate boned with piezoelectric semiconductor (PSC) film using the partial wave method. Furthermore, the dispersion, loss, and attenuation curves of the LSAW in the composite structure have been obtained by combining the boundary conditions at the top of the film and the continuity conditions on the interface between the film and the substrate. Numerical examples illustrate the effects of PSC film thickness-to-wavelength ratio, steady-state carrier concentration, and biasing electric field on the dispersion, loss, and attenuation curves of LSAW in AlN film/LiNbO₃ substrate. In addition, we conducted simulation by means of the PDE module in COMSOL. The theoretical results are consistent with the simulations, which could be helpful for the design of surface acoustic wave devices based on PSC materials.

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层状压电半导体结构中泄漏表面声波的传播

一些压电材料（如 ZnO 和 AlN）不仅具有压电特性，还具有半导体特性。本文采用偏波法，建立了由压电衬底和压电半导体（PSC）薄膜组成的结构的漏表面声波（LSAW）解析解。此外，通过结合薄膜顶部的边界条件和薄膜与衬底界面上的连续性条件，还得到了复合结构中泄漏声波的频散、损耗和衰减曲线。数值实例说明了 PSC 薄膜厚度波长比、稳态载流子浓度和偏置电场对 AlN 薄膜/LiNbO3 衬底中 LSAW 的色散、损耗和衰减曲线的影响。此外，我们还利用 COMSOL 中的 PDE 模块进行了仿真。理论结果与仿真结果一致，有助于设计基于 PSC 材料的表面声波器件。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Thin-Walled Structures 工程技术-工程：土木

CiteScore

9.60

自引率

20.30%

发文量

801

审稿时长

66 days

期刊介绍： Thin-walled structures comprises an important and growing proportion of engineering construction with areas of application becoming increasingly diverse, ranging from aircraft, bridges, ships and oil rigs to storage vessels, industrial buildings and warehouses. Many factors, including cost and weight economy, new materials and processes and the growth of powerful methods of analysis have contributed to this growth, and led to the need for a journal which concentrates specifically on structures in which problems arise due to the thinness of the walls. This field includes cold– formed sections, plate and shell structures, reinforced plastics structures and aluminium structures, and is of importance in many branches of engineering. The primary criterion for consideration of papers in Thin–Walled Structures is that they must be concerned with thin–walled structures or the basic problems inherent in thin–walled structures. Provided this criterion is satisfied no restriction is placed on the type of construction, material or field of application. Papers on theory, experiment, design, etc., are published and it is expected that many papers will contain aspects of all three.