Pulsed laser deposition of Nd-doped BaSnO3 thin films on c-plane sapphire substrate for transparent sensors

IF 3.9 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Materials Science and Engineering B-advanced Functional Solid-state Materials Pub Date : 2024-10-29 DOI:10.1016/j.mseb.2024.117768

Gitanjali Mishra, Ashutosh Tiwari

引用次数: 0

Abstract

This paper discusses the growth and characterization of Nd-doped BaSnO₃ (NDBSO) thin films on sapphire (0001) substrates using the Pulsed Laser Deposition (PLD) technique. NDBSO is a promising material for transparent sensors and electronics due to its wide bandgap. The study demonstrates a well-aligned heteroepitaxial growth of NDBSO on sapphire (0001) with a lattice parameter of 0.4226 nm. The results revealed high reliability and minimal aging effects under various environmental conditions. The utilization of PLD offered precise control over film thickness, enabling the fabrication of high-quality ultra-thin films approximately 500 nm in thickness through the ablation process involving 10,000 laser pulses. Key performance indicators (KPIs) include high transparency (>90 % for wavelengths above 500 nm), reproducibility, and structural stability.

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掺钕 BaSnO3 薄膜在 c 平面蓝宝石衬底上的脉冲激光沉积，用于制造透明传感器

本文讨论了利用脉冲激光沉积（PLD）技术在蓝宝石（0001）基底上生长掺钕的 BaSnO3（NDBSO）薄膜及其特性。NDBSO 具有宽带隙，是一种很有前途的透明传感器和电子器件材料。该研究表明，NDBSO 在晶格参数为 0.4226 nm 的蓝宝石 (0001) 上实现了良好对齐的异外延生长。研究结果表明，在各种环境条件下，NDBSO 的可靠性很高，老化效应很小。PLD 的使用提供了对薄膜厚度的精确控制，通过 10,000 个激光脉冲的烧蚀过程，能够制造出厚度约为 500 nm 的高质量超薄薄膜。关键性能指标（KPI）包括高透明度（波长超过 500 纳米时为 90%）、可重复性和结构稳定性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Materials Science and Engineering B-advanced Functional Solid-state Materials 工程技术-材料科学：综合

CiteScore

5.60

自引率

2.80%

发文量

481

审稿时长

3.5 months

期刊介绍： The journal provides an international medium for the publication of theoretical and experimental studies and reviews related to the electronic, electrochemical, ionic, magnetic, optical, and biosensing properties of solid state materials in bulk, thin film and particulate forms. Papers dealing with synthesis, processing, characterization, structure, physical properties and computational aspects of nano-crystalline, crystalline, amorphous and glassy forms of ceramics, semiconductors, layered insertion compounds, low-dimensional compounds and systems, fast-ion conductors, polymers and dielectrics are viewed as suitable for publication. Articles focused on nano-structured aspects of these advanced solid-state materials will also be considered suitable.