Tracing of low-energy protons implanted in different Si crystal orientations by keV recoil detection in transmission geometry

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2024-10-22 DOI:10.1016/j.nimb.2024.165546

R. Holeňák , E. Ntemou , M. Kokkoris , S. Petrović , D. Primetzhofer

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引用次数: 0

Abstract

The potential of recoil detection in transmission geometry in examining a possible preferential lattice site location of H atoms implanted into thin single crystalline silicon membranes is explored. Low-energy protons were directed onto the membranes along the 〈0 0 1〉 Si crystal axis, as well as in random orientation. Position-sensitive and time-resolved detection of recoiling hydrogen species from a pulsed beam of 280 keV ²²Ne⁺ primary ions was performed in a time-of-flight medium energy ion scattering system. From the primary beam incidence along different crystal axes, a preferential detection of recoiled hydrogen along the 〈0 1 1〉 axis can be revealed, as compared to the 〈0 0 1〉 axis. The present approach and possible future developments potentially enabling real-space location of interstitial hydrogen are discussed.

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通过透射几何中的 keV 反冲探测追踪植入不同硅晶体取向的低能质子

本研究探讨了透射几何中的反冲探测在研究植入单晶硅薄膜的 H 原子可能的优先晶格位置方面的潜力。低能质子沿〈0 0 1〉硅晶轴线以及随机取向射入薄膜。在飞行时间中能离子散射系统中，对来自 280 keV 22Ne+ 初级离子脉冲束的反冲氢物种进行了位置敏感和时间分辨探测。从主离子束沿不同晶轴的入射情况来看，与〈0 0 1〉轴相比，沿着〈0 1 1〉轴可以优先探测到反冲氢。本文讨论了目前的方法和未来可能的发展，这些发展有可能实现间隙氢的真实空间定位。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.