Corrosion-life prediction model for 316L stainless steel under electronic special gases containing trace moisture employed in semiconductor manufacturing industry

IF 7.4 1区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Corrosion Science Pub Date : 2024-10-15 DOI:10.1016/j.corsci.2024.112510

Zhice Yang , Chaoran Ma , Yuxin Zhang , Zhuoyang Du , Peng Zhou , Yang Zhao , Tao Zhang , Fuhui Wang

引用次数: 0

Abstract

Special gases with trace moisture cause the formation of dynamic acidic microdroplets (DMD), which results in corrosion of semiconductor manufacturing devices. In this study, a predictive model for corrosion damage in 316L stainless steel (SS) was developed by combining the DMD process and the pitting initiation model. The DMD process was modeled using the BET model to describe the moisture-to-solution conversion. The pitting initiation model was reconstructed by incorporating the Sridhar model, temporal corrosion model, and Macdonald model. Finally, the predicted results were validated by various experimental data, indicating that the prediction model was accurate and highly reliable.

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316L 不锈钢在半导体制造业使用的含微量水分的电子特殊气体下的腐蚀寿命预测模型

含有微量水分的特殊气体会形成动态酸性微滴（DMD），从而导致半导体制造设备的腐蚀。本研究结合 DMD 过程和点蚀引发模型，开发了 316L 不锈钢 (SS) 腐蚀损伤预测模型。DMD 过程使用 BET 模型来描述水分到溶液的转化。结合 Sridhar 模型、时间腐蚀模型和 Macdonald 模型重建了点蚀引发模型。最后，各种实验数据对预测结果进行了验证，表明预测模型准确可靠。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Corrosion Science 工程技术-材料科学：综合

CiteScore

13.60

自引率

18.10%

发文量

763

审稿时长

46 days

期刊介绍： Corrosion occurrence and its practical control encompass a vast array of scientific knowledge. Corrosion Science endeavors to serve as the conduit for the exchange of ideas, developments, and research across all facets of this field, encompassing both metallic and non-metallic corrosion. The scope of this international journal is broad and inclusive. Published papers span from highly theoretical inquiries to essentially practical applications, covering diverse areas such as high-temperature oxidation, passivity, anodic oxidation, biochemical corrosion, stress corrosion cracking, and corrosion control mechanisms and methodologies. This journal publishes original papers and critical reviews across the spectrum of pure and applied corrosion, material degradation, and surface science and engineering. It serves as a crucial link connecting metallurgists, materials scientists, and researchers investigating corrosion and degradation phenomena. Join us in advancing knowledge and understanding in the vital field of corrosion science.