Optical parameter inversion of thin films based on angular reflectance spectroscopy

Abstract

This article proposes a method for obtaining the refractive index and thickness of thin films based on reflectivity at different angles combined with optimization algorithms. This method has high computational accuracy for both high absorption films (such as aluminum films, gold films, etc.) and low absorption films (such as MgF₂ films). Since this study did not adopt the inversion scheme of refractive index dispersion equation fitting, it can be used for optical constant inversion in the case of unknown composition of coating materials. The results indicate that this method can simultaneously obtain high-precision information on the complex refractive index and film thickness of the coating material on the substrate. The calculation example achieved a thickness inversion error of 0.165 % for a 2nm metal aluminum film layer and 0.3303 % for a 150 nm MgF₂ transparent film layer. Therefore, this study may provide further guidance for high absorption and measurement of the complex refractive index and thickness of transparent films.