Small Scale Emitter for an Excilamp with the Wavelength of 126 nm

IF 0.4 4区工程技术 Q4 ENGINEERING, MULTIDISCIPLINARY

Instruments and Experimental Techniques Pub Date : 2024-10-23 DOI:10.1134/S0020441224700817

V. S. Skakun, V. F. Tarasenko, V. A. Panarin, D. A. Sorokin

引用次数: 0

Abstract

A compact emitter of a relatively simple design with argon filling has been developed, which can be used to create VUV and UV excilamps. Its characteristics were investigated. To increase the radiation power on the second continuum of argon dimers (λ ≈ 126 nm), a method based on gas flow through the discharge region was used. At an excitation pulse repetition rate of 96 kHz, the radiation power density at λ ≈ 126 nm behind the output window made of MgF₂ greater than 5 mW/cm² was obtained. It is shown that argon flow at a rate of 0.5–1 L/s through the discharge region makes it possible to stabilize the average power of VUV radiation at a level no worse than 2%.

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波长为 126 纳米的小型激光灯发射器

我们开发了一种设计相对简单的紧凑型氩气填充发射器，可用于制造紫外线和紫外激光灯。我们对其特性进行了研究。为了提高氩二聚体第二连续波（λ ≈ 126 nm）的辐射功率，使用了一种基于气体流经放电区的方法。在激发脉冲重复频率为 96 kHz 时，MgF2 输出窗口后 λ ≈ 126 nm 处的辐射功率密度大于 5 mW/cm2。结果表明，以 0.5-1 升/秒的速率通过放电区的氩气流可以将紫外辐射的平均功率稳定在不低于 2% 的水平。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Instruments and Experimental Techniques 工程技术-工程：综合

CiteScore

1.20

自引率

33.30%

发文量

113

审稿时长

4-8 weeks

期刊介绍： Instruments and Experimental Techniques is an international peer reviewed journal that publishes reviews describing advanced methods for physical measurements and techniques and original articles that present techniques for physical measurements, principles of operation, design, methods of application, and analysis of the operation of physical instruments used in all fields of experimental physics and when conducting measurements using physical methods and instruments in astronomy, natural sciences, chemistry, biology, medicine, and ecology.