Testing the accuracy of low-beam-energy electron-excited X-ray microanalysis with energy-dispersive spectrometry

IF 3.5 3区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Materials Science Pub Date : 2024-10-14 DOI:10.1007/s10853-024-10285-4

Dale E. Newbury, Nicholas W. M. Ritchie

{"title":"Testing the accuracy of low-beam-energy electron-excited X-ray microanalysis with energy-dispersive spectrometry","authors":"Dale E. Newbury, Nicholas W. M. Ritchie","doi":"10.1007/s10853-024-10285-4","DOIUrl":null,"url":null,"abstract":"<div><p>The accuracy of electron-excited X-ray microanalysis with energy-dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for certified reference materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition which had microscopic homogeneity suitable for microanalysis. Two-hundred sixty-three concentration measurements for 39 elements in 113 materials were determined following the <i>k-ratio protocol</i> and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the <i>relative deviation from expected value</i> (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV.</p></div>","PeriodicalId":645,"journal":{"name":"Journal of Materials Science","volume":"59 40","pages":"19088 - 19111"},"PeriodicalIF":3.5000,"publicationDate":"2024-10-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s10853-024-10285-4.pdf","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Materials Science","FirstCategoryId":"88","ListUrlMain":"https://link.springer.com/article/10.1007/s10853-024-10285-4","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

Abstract

The accuracy of electron-excited X-ray microanalysis with energy-dispersive spectrometry (EDS) has been tested in the low beam energy range, specifically at an incident beam energy of 5 keV, which is the lowest beam energy for which a useful characteristic X-ray peak can be excited for all elements of the periodic table, excepting H and He. Elemental analysis results are reported for certified reference materials (CRM), stoichiometric compounds, minerals, and metal alloys of independently known or measured composition which had microscopic homogeneity suitable for microanalysis. Two-hundred sixty-three concentration measurements for 39 elements in 113 materials were determined following the k-ratio protocol and using the EDS analytical software NIST DTSA-II. The accuracy of the results, as characterized by the relative deviation from expected value (RDEV) metric, was such that more than 98% of the results were found to be captured within a range of ±5% RDEV, while 82% of the results fell in the range -2% to 2% RDEV.

查看原文本刊更多论文

利用能量色散光谱法测试低束流电子激发 X 射线微分析的准确性

利用能量色散光谱法（EDS）对电子激发 X 射线显微分析的准确性进行了低束流能量范围内的测试，特别是在入射束流能量为 5 keV 时，这是元素周期表中所有元素（H 和 He 除外）都能激发出有用特征 X 射线峰的最低束流能量。报告中的元素分析结果是针对独立已知或测量的、具有适合微观分析的微观均匀性的有证标准物质 (CRM)、化学合成化合物、矿物和金属合金。按照 k 比率协议，使用 EDS 分析软件 NIST DTSA-II 对 113 种材料中的 39 种元素进行了 263 次浓度测量。根据与预期值的相对偏差 (RDEV) 指标，98% 以上的结果在 ±5% RDEV 范围内，82% 的结果在 -2% 至 2% RDEV 范围内。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of Materials Science 工程技术-材料科学：综合

CiteScore

7.90

自引率

4.40%

发文量

1297

审稿时长

2.4 months

期刊介绍： The Journal of Materials Science publishes reviews, full-length papers, and short Communications recording original research results on, or techniques for studying the relationship between structure, properties, and uses of materials. The subjects are seen from international and interdisciplinary perspectives covering areas including metals, ceramics, glasses, polymers, electrical materials, composite materials, fibers, nanostructured materials, nanocomposites, and biological and biomedical materials. The Journal of Materials Science is now firmly established as the leading source of primary communication for scientists investigating the structure and properties of all engineering materials.