Achieving Ambipolar Transport Characteristics in the n-WS2 Channel via Remote p-Doping and its Enhancement-Mode Ambipolar Field-Effect Transistor Operation
IF 4.3 3区 材料科学Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
{"title":"Achieving Ambipolar Transport Characteristics in the n-WS2 Channel via Remote p-Doping and its Enhancement-Mode Ambipolar Field-Effect Transistor Operation","authors":"Joonyup Bae, Dongryul Lee and Jihyun Kim*, ","doi":"10.1021/acsaelm.4c0130710.1021/acsaelm.4c01307","DOIUrl":null,"url":null,"abstract":"<p >To overcome the inherent short-channel effects in Si microelectronics and enhance the performances of ultrahigh-density integrated circuits, researchers are focused on developing next-generation channel materials compatible with Si industry standards. Ambipolar two-dimensional (2D) transition metal dichalcogenides (TMDs), such as WS<sub>2</sub>, exhibit great promise due to their layer-dependent bandgaps and highly comparable carrier mobilities for both holes and electrons. However, the prevalence of defects in WS<sub>2</sub>, particularly chalcogen vacancies, often results in n-dominant behavior, restricting ambipolar transport. For the integration of n-WS<sub>2</sub> into Si-based complementary metal-oxide semiconductor (CMOS) platforms, reliable hole-doping techniques are essential to achieve comparable hole and electron transports. Herein, we introduce a remote charge-transfer doping approach to enable the stable hole-doping of n-WS<sub>2</sub> while maintaining its electron-conductive properties. Using WSe<sub>2</sub> as the separation layer and WO<sub><i>x</i></sub> for remote p-doping, we achieve enhancement-mode ambipolar WS<sub>2</sub>/WSe<sub>2</sub>–WO<sub><i>x</i></sub> heterostructure field-effect transistors (FETs). The fabricated ambipolar WS<sub>2</sub>/WSe<sub>2</sub>–WO<sub><i>x</i></sub> FETs demonstrate comparable field-effect carrier mobilities (hole: 267 cm<sup>2</sup>/V s and electron: 13.6 cm<sup>2</sup>/V s) and current on/off ratios (hole: ∼1 × 10<sup>8</sup> and electron: ∼1 × 10<sup>7</sup>). These results highlight the stable operational characteristics of the device and underscore the potential of 2D materials to reduce the footprint of the CMOS architecture and simplify the complex CMOS fabrication process.</p>","PeriodicalId":3,"journal":{"name":"ACS Applied Electronic Materials","volume":"6 10","pages":"7416–7423 7416–7423"},"PeriodicalIF":4.3000,"publicationDate":"2024-09-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Applied Electronic Materials","FirstCategoryId":"88","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acsaelm.4c01307","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
To overcome the inherent short-channel effects in Si microelectronics and enhance the performances of ultrahigh-density integrated circuits, researchers are focused on developing next-generation channel materials compatible with Si industry standards. Ambipolar two-dimensional (2D) transition metal dichalcogenides (TMDs), such as WS2, exhibit great promise due to their layer-dependent bandgaps and highly comparable carrier mobilities for both holes and electrons. However, the prevalence of defects in WS2, particularly chalcogen vacancies, often results in n-dominant behavior, restricting ambipolar transport. For the integration of n-WS2 into Si-based complementary metal-oxide semiconductor (CMOS) platforms, reliable hole-doping techniques are essential to achieve comparable hole and electron transports. Herein, we introduce a remote charge-transfer doping approach to enable the stable hole-doping of n-WS2 while maintaining its electron-conductive properties. Using WSe2 as the separation layer and WOx for remote p-doping, we achieve enhancement-mode ambipolar WS2/WSe2–WOx heterostructure field-effect transistors (FETs). The fabricated ambipolar WS2/WSe2–WOx FETs demonstrate comparable field-effect carrier mobilities (hole: 267 cm2/V s and electron: 13.6 cm2/V s) and current on/off ratios (hole: ∼1 × 108 and electron: ∼1 × 107). These results highlight the stable operational characteristics of the device and underscore the potential of 2D materials to reduce the footprint of the CMOS architecture and simplify the complex CMOS fabrication process.
期刊介绍:
ACS Applied Electronic Materials is an interdisciplinary journal publishing original research covering all aspects of electronic materials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials science, engineering, optics, physics, and chemistry into important applications of electronic materials. Sample research topics that span the journal's scope are inorganic, organic, ionic and polymeric materials with properties that include conducting, semiconducting, superconducting, insulating, dielectric, magnetic, optoelectronic, piezoelectric, ferroelectric and thermoelectric.
Indexed/Abstracted:
Web of Science SCIE
Scopus
CAS
INSPEC
Portico