Research on Multiphysics-Driven MEMS Safety and Arming Devices.

IF 3 3区 工程技术 Q2 CHEMISTRY, ANALYTICAL
Micromachines Pub Date : 2024-09-26 DOI:10.3390/mi15101194
Xinyu Fan, Tengjiang Hu, Yifei Wang, Yulong Zhao, Zhongwang Tian, Wei Xue
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Abstract

As the core component of energy transfer in weapon system, safety and arming (S&A) devices affect the safety, reliability, and damage ability of the weapon. Micro-electromechanical systems (MEMS) S&A devices have been widely investigated for their smaller structure size, higher functional integration, and better smart functionality. This paper proposes the design of a multi-physics field-driven MEMS S&A device. The S&A mechanism is composed of a setback mechanism, a spin mechanism, and an electrothermal mechanism, achieving multiphysics-arming. With the coordination of the three mechanisms, the S&A device can produce a 1 mm displacement. The displacement generated allows the S&A device to switch between safety status and arming status. The unlock conditions and overload resistance of each mechanism are obtained by finite element simulation. Based on SOI wafers and silicon oxide wafers, the chips were fabricated and packaged. Several tests were carried out to verify the working condition and overload resistance of the S&A device. The result shows that under a voltage of 11 V and a rotation speed of 8000 r/min, with a size no more than 10 mm × 10 mm × 1.5 mm, the device works smoothly and can withstand an overload of 25,000 g.

多物理场驱动的微机电系统安全和布防装置研究。
作为武器系统中能量传递的核心部件,安全和布防(S&A)装置影响着武器的安全性、可靠性和毁伤能力。微机电系统(MEMS)安全与布防装置以其更小的结构尺寸、更高的功能集成度和更好的智能功能被广泛研究。本文提出了一种多物理场驱动 MEMS S&A 装置的设计方案。S&A 机制由挫折机制、自旋机制和电热机制组成,实现了多物理场驱动。在三种机制的配合下,S&A 装置可以产生 1 毫米的位移。产生的位移可使 S&A 装置在安全状态和布防状态之间切换。每个机构的解锁条件和抗过载能力都是通过有限元模拟获得的。以 SOI 晶圆和氧化硅晶圆为基础,对芯片进行了制造和封装。为了验证 S&A 器件的工作条件和抗过载能力,进行了多次测试。结果表明,在电压为 11 V、转速为 8000 r/min、尺寸不大于 10 mm × 10 mm × 1.5 mm 的条件下,该装置工作平稳,并能承受 25,000 g 的过载。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Micromachines
Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION
CiteScore
5.20
自引率
14.70%
发文量
1862
审稿时长
16.31 days
期刊介绍: Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.
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