A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison.

IF 3 3区工程技术 Q2 CHEMISTRY, ANALYTICAL

Micromachines Pub Date : 2024-10-21 DOI:10.3390/mi15101274

Koosha Karimi, Ali Fardoost, Nikhil Mhatre, Jay Rajan, David Boisvert, Mehdi Javanmard

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引用次数: 0

Abstract

In recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications. This review provides a comprehensive analysis of emerging fabrication technologies, including photolithography, soft lithography, 3D printing, electron-beam lithography (EBL), wet/dry etching, injection molding, focused ion beam (FIB) milling, laser micromachining, and micro-milling. Each of these methods offers unique advantages in terms of scalability, precision, and cost-effectiveness, enabling the creation of highly customized micro- and nanochannel structures. Challenges related to scalability, resolution, and the high cost of traditional techniques are addressed through innovations such as deep reactive ion etching (DRIE) and multipass micro-milling. This paper also explores the application potential of these technologies in areas such as lab-on-a-chip devices, biomedical diagnostics, and energy-efficient cooling systems. With continued research and technological refinement, these methods are poised to significantly impact the future of microfluidic and nanofluidic systems.

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全面回顾微通道和纳米通道制造的新兴技术：限制、应用和比较。

近年来，由于生物医学、环境和工业应用对精度的要求，微通道和纳米通道制造领域取得了长足的进步。本综述全面分析了新兴的制造技术，包括光刻、软光刻、三维打印、电子束光刻（EBL）、干/湿蚀刻、注射成型、聚焦离子束（FIB）铣削、激光微加工和微铣削。这些方法在可扩展性、精确度和成本效益方面都具有独特的优势，能够制造出高度定制的微通道和纳米通道结构。深反应离子刻蚀（DRIE）和多通道微铣削等创新技术解决了与可扩展性、分辨率和传统技术的高成本有关的难题。本文还探讨了这些技术在片上实验室设备、生物医学诊断和节能冷却系统等领域的应用潜力。随着研究的不断深入和技术的不断完善，这些方法将对微流体和纳米流体系统的未来产生重大影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION

CiteScore

5.20

自引率

14.70%

发文量

1862

审稿时长

16.31 days

期刊介绍： Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.