High-performance PANI sensor on silicon nanowire arrays for sub-ppb NH3 detection.

Abstract

For industrial production and disease diagnosis, real-time detection of low concentrations of NH₃ is crucial, necessitating a gas-sensitive sensor compatible with integrated processes and exhibiting excellent performance. Herein, we employed wet etching and rapid in-situ polymerization on silicon nanowire substrates to grow polyaniline fibers, thereby fabricating NH₃ gas sensors with p-p heterojunction and three-dimensional network structures. Characterization and gas sensing performance testing were conducted. The results demonstrate the outstanding NH₃ detection capabilities of the sensor, providing stable responses down to concentrations as low as 1 ppb, which indicates its LOD is one to two orders of magnitude lower than current similar products. It also exhibits verified selectivity and long-term reliability. The excellent sensing performance is attributed to the high surface area from the silicon nanowire structure and efficient synergy of p-p heterojunction. Additionally, the influence of doping types of the substrates and annealing process were explored. This work serves as a reference for the design of silicon-based gas sensors with high sensitivity, low detection limits, and extended operational lifetimes, suitable for deployment in commercial integrated monitoring systems.