Spin Hall effect in platinum deposited by atomic layer deposition

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2024-10-17 DOI:10.1063/5.0229825

Ken Ishida, Kota Sato, Pham Nam Hai

引用次数: 0

Abstract

We investigated the spin Hall effect of Pt thin films deposited by atomic layer deposition (ALD) using the MeCpPtMe3 precursor on c-plane sapphire substrates. We show that while the spin Hall conductivity of ALD-grown Pt is relatively low (0.2–0.6 × 105ℏ2eΩ−1 m−1) for Pt film thicknesses less than 7 nm, it suddenly increases for thicker films, reaching 2.5–3.0 × 105ℏ2eΩ−1 m−1. This behavior is attributed to the intrinsic morphology of Pt thin films grown by ALD on sapphire, where ultrathin films (<7 nm) contain small islands, while thicker films are smoother due to the coalescence of islands. Our findings underscore the necessity of growing continuous films when applying ALD-grown spin Hall materials in three-dimensional (3D) spin–orbit torque (SOT) devices. These results confirm the potential of ALD in advancing SOT applications and pave the way for the development of next-generation three-dimensional SOT spintronic devices.

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原子层沉积铂中的自旋霍尔效应

我们研究了在 c 平面蓝宝石基底上使用 MeCpPtMe3 前驱体通过原子层沉积 (ALD) 技术沉积的铂薄膜的自旋霍尔效应。我们的研究表明，当铂薄膜厚度小于 7 nm 时，ALD 生长的铂的自旋霍尔电导率相对较低（0.2-0.6 × 105ℏ2eΩ-1 m-1），但当薄膜越厚时，电导率突然增加，达到 2.5-3.0 × 105ℏ2eΩ-1 m-1。这种行为归因于在蓝宝石上通过 ALD 生长的铂薄膜的固有形态，其中超薄薄膜（<7 nm）含有小的岛屿，而较厚的薄膜由于岛屿的凝聚而更加光滑。我们的发现强调了在三维（3D）自旋轨道力矩（SOT）器件中应用 ALD 生长的自旋霍尔材料时，生长连续薄膜的必要性。这些结果证实了 ALD 在推动 SOT 应用方面的潜力，并为开发下一代三维 SOT 自旋电子器件铺平了道路。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.