{"title":"Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement","authors":"Jifeng Chu, Zhuoli Deng, Jianbin Pan, Aijun Yang, Qiongyuan Wang, Hongye Yuan, Huan Yuan, Feng Xin, Mingzhe Rong, Xiaohua Wang","doi":"10.1021/acssensors.4c01903","DOIUrl":null,"url":null,"abstract":"Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF<sub>6</sub> decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H<sub>2</sub>S, SO<sub>2</sub>, and CO), the effectiveness of the optimization method has been validated, as well. With the high linearity and stable baseline obtained from AC impedance measurement, it enables rapid correction of temperature drift within environmental temperatures ranging from 10 to 30 °C. Overall, the proposed method can provide a novel approach to inhibit the drift failure of semiconductor gas sensors.","PeriodicalId":24,"journal":{"name":"ACS Sensors","volume":null,"pages":null},"PeriodicalIF":8.2000,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Sensors","FirstCategoryId":"92","ListUrlMain":"https://doi.org/10.1021/acssensors.4c01903","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
引用次数: 0
Abstract
Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF6 decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H2S, SO2, and CO), the effectiveness of the optimization method has been validated, as well. With the high linearity and stable baseline obtained from AC impedance measurement, it enables rapid correction of temperature drift within environmental temperatures ranging from 10 to 30 °C. Overall, the proposed method can provide a novel approach to inhibit the drift failure of semiconductor gas sensors.
期刊介绍:
ACS Sensors is a peer-reviewed research journal that focuses on the dissemination of new and original knowledge in the field of sensor science, particularly those that selectively sense chemical or biological species or processes. The journal covers a broad range of topics, including but not limited to biosensors, chemical sensors, gas sensors, intracellular sensors, single molecule sensors, cell chips, and microfluidic devices. It aims to publish articles that address conceptual advances in sensing technology applicable to various types of analytes or application papers that report on the use of existing sensing concepts in new ways or for new analytes.