{"title":"A flexible capacitive proximity-tactile dual-mode sensor based on the biomimetic petal-like electrode","authors":"","doi":"10.1016/j.sna.2024.115975","DOIUrl":null,"url":null,"abstract":"<div><div>Flexible capacitive proximity-tactile dual-mode sensors not only have good stability, non-contact detection distance and sensitivity, but also can get rid of the limitation of single contact sensing performance. It integrates other functions such as extensibility, tactile perception, etc., forming dual-mode flexible wearable electronic skins with strong adaptability to application scenarios. However, under the premise of fully balancing the manufacturing process and cost, how to effectively and significantly improve the non-contact and contact performance of capacitive flexible proximity sensors remains an important issue. By utilizing the edge effect and biomimetic concept, we propose a flexible capacitive dual-mode sensor based on petal-like electrode, which has a relative variation of capacitance to −32.4 % and can detect objects within 5 cm. With the further assistance of the porous microstructure dielectric layer, the tactile performance of the sensor exhibits high sensitivity of 0.132 kPa<sup>−1</sup>, low pressure resolution of 6.9 Pa, and good stability after thousands of pressure test cycles. In addition, an object detection system based on a flexible capacitive dual-mode sensor array has been developed. The experimental results show that the shape and position of the approaching object are detected in proximity mode, and the size and position distribution of pressure are detected in tactile mode. The ideal performance of sensor has broad application prospects in fields such as spatial recognition, human-computer interaction, and intelligent electronic skin.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2024-10-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Sensors and Actuators A-physical","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0924424724009695","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Flexible capacitive proximity-tactile dual-mode sensors not only have good stability, non-contact detection distance and sensitivity, but also can get rid of the limitation of single contact sensing performance. It integrates other functions such as extensibility, tactile perception, etc., forming dual-mode flexible wearable electronic skins with strong adaptability to application scenarios. However, under the premise of fully balancing the manufacturing process and cost, how to effectively and significantly improve the non-contact and contact performance of capacitive flexible proximity sensors remains an important issue. By utilizing the edge effect and biomimetic concept, we propose a flexible capacitive dual-mode sensor based on petal-like electrode, which has a relative variation of capacitance to −32.4 % and can detect objects within 5 cm. With the further assistance of the porous microstructure dielectric layer, the tactile performance of the sensor exhibits high sensitivity of 0.132 kPa−1, low pressure resolution of 6.9 Pa, and good stability after thousands of pressure test cycles. In addition, an object detection system based on a flexible capacitive dual-mode sensor array has been developed. The experimental results show that the shape and position of the approaching object are detected in proximity mode, and the size and position distribution of pressure are detected in tactile mode. The ideal performance of sensor has broad application prospects in fields such as spatial recognition, human-computer interaction, and intelligent electronic skin.
期刊介绍:
Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas:
• Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results.
• Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon.
• Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays.
• Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers.
Etc...