Arrayed multi-layer piezoelectric sensor based on electrospun P(VDF-TrFE)/ZnO with enhanced piezoelectricity

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2024-10-10 DOI:10.1016/j.sna.2024.115970

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引用次数: 0

Abstract

Flexible pressure sensors can maintain good pressure sensing capabilities even under arbitrary degrees of deformation, which are widely used in fields such as robotic perception, physiological signal detection and wearable electronics. Currently, piezoelectric-based flexible pressure sensors face significant limitations in terms of large-area, high-sensitivity, and high-resolution pressure detection. Targeted research efforts primarily focus on enhancing the performance of piezoelectric sensors by optimizing the properties of the sensitive layer piezoelectric material and modulating device structural design. This study introduces a novel multilayer array design for flexible composite piezoelectric sensors. A high-voltage electrospinning selective deposition process is proposed to fabricate arrayed nanofiber mats. Patterned electrospun films can be automatically patterned by patterned AgNW electrodes, which allows manual alignment of patterns for subsequent stacking. Compared to sensor based on P(VDF-TrFE) prepared under the same conditions, the sensitivity of the multi-layer P(VDF-TrFE)/ZnO sensor increased from 2.82 mV/kPa to 8.30 mV/kPa, providing an effective approach for highly sensitivity wearable devices with short response time (~5 ms).

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基于具有增强压电性的电纺 P（VDF-TrFE）/氧化锌的阵列式多层压电传感器

柔性压力传感器即使在任意变形程度下也能保持良好的压力传感能力，被广泛应用于机器人感知、生理信号检测和可穿戴电子设备等领域。目前，基于压电的柔性压力传感器在大面积、高灵敏度和高分辨率压力检测方面面临着很大的局限性。有针对性的研究工作主要集中在通过优化敏感层压电材料的特性和调节器件结构设计来提高压电传感器的性能。本研究介绍了一种用于柔性复合压电传感器的新型多层阵列设计。研究提出了一种高压电纺选择性沉积工艺来制造阵列纳米纤维毡。图案化的电纺薄膜可通过图案化的 AgNW 电极自动图案化，从而可在随后的堆叠过程中手动对齐图案。与在相同条件下制备的基于 P(VDF-TrFE) 的传感器相比，多层 P(VDF-TrFE)/ZnO 传感器的灵敏度从 2.82 mV/kPa 提高到 8.30 mV/kPa，为高灵敏度、短响应时间（约 5 毫秒）的可穿戴设备提供了一种有效的方法。

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...