Study on the groove geometry of pad in water dissolution polishing of soft brittle materials based on trajectory analysis

Abstract

During the water dissolution polishing process of soft brittle materials, the pad's groove geometry plays a significant role in determining the performance. This not only affects the flow of the slurry but also directly impacts the overall distribution of the water core on the pad surface, thereby influencing the polishing effect. A trajectory model of the water core on the workpiece surface was established through kinematic analysis and the characteristics and effects of the pad's groove geometry in circular, radial, composite, and grid were studied combined with the trajectory analysis. The coefficient of variation and power spectral density were established to evaluate the trajectory uniformity. The trajectory density distribution was quantitatively analyzed to obtain a better understanding of the material removal uniformity. The simulation and experiment results indicated that the existence of groove geometry will greatly affect the flow of slurry and the surface quality. The grid groove had a better distribution of water core, which means better material removal. There exists a tradeoff between the number of grooves and their spacing. These insights offer a fresh perspective and serve as a valuable reference for further research and analysis into the groove characteristics of pads.