Crystallographic anisotropy-dependent mechanochemical removal of GaAs: Nanoasperity experiments and atomistic simulations

IF 6.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

Tribology International Pub Date : 2024-09-27 DOI:10.1016/j.triboint.2024.110286

Jian Gao , Huaicheng Zhou , Yangyang Lu , Honglin Zhang , Junhui Sun , Yang Wang , Linmao Qian , Chen Xiao , Bingjun Yu

引用次数: 0

Abstract

In this paper, the nanoasperity wear tests on GaAs surfaces with different crystallographic orientations against SiO₂ microsphere were performed using AFM. The removal behavior characterized by in-situ AFM imaging significantly relies on crystallographic anisotropy (111 > 110 > 100). The atomic structure of worn area characterized by HRTEM shows perfect crystal lattice, demonstrating the dominate role of the interfacial mechanochemical reactions during the material removal of GaAs. DFT calculations were conducted and the results reveal that the charge re-distribution behavior at the SiO₂/GaAs interface governs the mechanochemical reactions, essentially leading to the crystallographic anisotropy dependence. This study not only enriches the mechanochemical reaction mechanism, but also benefits for the CMP optimization for GaAs.

查看原文本刊更多论文

晶体各向异性依赖于机械化学去除砷化镓：纳米晶粒度实验和原子模拟

本文使用原子力显微镜对不同晶体学取向的砷化镓表面与二氧化硅微球进行了纳米级磨损测试。原位原子力显微镜成像表征的磨损行为在很大程度上依赖于晶体学各向异性（111 > 110 >100）。用 HRTEM 表征的磨损区域的原子结构显示出完美的晶格，证明了在 GaAs 材料去除过程中界面机械化学反应的主导作用。我们进行了 DFT 计算，结果表明 SiO2/GaAs 界面的电荷再分布行为控制着机械化学反应，从根本上导致了晶体学各向异性依赖性。这项研究不仅丰富了机械化学反应机制，而且有利于优化砷化镓的 CMP。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Tribology International 工程技术-工程：机械

CiteScore

10.10

自引率

16.10%

发文量

627

审稿时长

35 days

期刊介绍： Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International. Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.