Effect of Surface Roughness on Range Straggling at Low Energy Ions Bombardment

IF 0.5 Q4 PHYSICS, CONDENSED MATTER
Mahdi Djallel
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引用次数: 0

Abstract

The primary ions strike the target in randomly distributed points of its surface, potentially leading to the creation of surface roughness. The first involves exploring the variation in density near surface target which is challenging to measure. The second focuses on observing alterations in the surface topography of the target by measuring the amount of deformation in the geometric structure. This brief work is clearly needed to clarify the first approach by adopting the feasible expressions to establish the dependence of the range straggling, energy and dose of ions beam on the basic mechanisms leading to surface roughness by introducing new parameter described the unchanged surface density rate. This parameter predicts the frequency of presence roughness phenomena. The results of our simulations performed for an amorphous target are in perfect agreement with experimental results obtained by Wach et al.

表面粗糙度对低能量离子轰击时范围拖尾的影响
原生离子在目标表面随机分布的点上撞击目标,可能导致表面粗糙。第一种方法涉及探索目标表面附近密度的变化,这对测量具有挑战性。第二项工作的重点是通过测量几何结构的变形量来观察目标表面形貌的变化。这项简短的工作显然需要澄清第一种方法,即采用可行的表达式,通过引入描述不变表面密度率的新参数,建立离子束的范围杂散、能量和剂量对导致表面粗糙度的基本机制的依赖关系。该参数可预测粗糙现象出现的频率。我们对无定形靶的模拟结果与 Wach 等人的实验结果完全一致。
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来源期刊
CiteScore
0.90
自引率
25.00%
发文量
144
审稿时长
3-8 weeks
期刊介绍: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.
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