{"title":"A Low Phase Jitter MEMS Oscillator with Centrally-Anchored Piezoelectric Resonator for Wide Temperature Range Real Time Clock Applications.","authors":"Shubham Sahasrabudhe, Yaoyao Long, Zhenming Liu, Farrokh Ayazi","doi":"10.1109/TUFFC.2024.3472509","DOIUrl":null,"url":null,"abstract":"<p><p>This paper describes prototype temperature compensated piezoelectric MEMS oscillators operating in the wide temperature range of -40 °C to 85 °C for RTC applications. The AlN-on-Si resonator is centrally anchored at one point and designed for low power operation with a wide frequency tuning range of 5000 ppm. The oscillators exhibit a stable sinusoidal output at about 497 kHz frequency for time keeping applications with an integrated phase jitter being 10× better than the best commercially available MEMS RTC oscillators for supplementary use in portable devices for clocking audio circuits. The measured oscillator performance remains relatively unchanged when comparing the wafer level packaged capped MEMS resonator with the uncapped one, showing great potential for a high performance low-power RTC oscillator.</p>","PeriodicalId":13322,"journal":{"name":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","volume":"PP ","pages":""},"PeriodicalIF":3.0000,"publicationDate":"2024-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE transactions on ultrasonics, ferroelectrics, and frequency control","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1109/TUFFC.2024.3472509","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ACOUSTICS","Score":null,"Total":0}
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Abstract
This paper describes prototype temperature compensated piezoelectric MEMS oscillators operating in the wide temperature range of -40 °C to 85 °C for RTC applications. The AlN-on-Si resonator is centrally anchored at one point and designed for low power operation with a wide frequency tuning range of 5000 ppm. The oscillators exhibit a stable sinusoidal output at about 497 kHz frequency for time keeping applications with an integrated phase jitter being 10× better than the best commercially available MEMS RTC oscillators for supplementary use in portable devices for clocking audio circuits. The measured oscillator performance remains relatively unchanged when comparing the wafer level packaged capped MEMS resonator with the uncapped one, showing great potential for a high performance low-power RTC oscillator.
期刊介绍：
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control includes the theory, technology, materials, and applications relating to: (1) the generation, transmission, and detection of ultrasonic waves and related phenomena; (2) medical ultrasound, including hyperthermia, bioeffects, tissue characterization and imaging; (3) ferroelectric, piezoelectric, and piezomagnetic materials, including crystals, polycrystalline solids, films, polymers, and composites; (4) frequency control, timing and time distribution, including crystal oscillators and other means of classical frequency control, and atomic, molecular and laser frequency control standards. Areas of interest range from fundamental studies to the design and/or applications of devices and systems.
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