Dynamics of large oscillations in electrostatic MEMS

IF 23.9 1区物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY

Physics Reports Pub Date : 2024-09-26 DOI:10.1016/j.physrep.2024.09.011

Majed S. Alghamdi , Mahmoud E. Khater , Mohamed Arabi , Eihab M. Abdel-Rahman

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引用次数: 0

Abstract

We present a comprehensive experimental study of the dynamics of electrostatic MEMS resonators under large excitations. We identified three frequency ranges where large oscillations occur; a non-resonant region driven by fast–slow dynamic interactions and two resonant regions. In these regions, we found a plethora of dynamic phenomena including cascades of period-doubling bifurcations, a bubble structure, homoclinic and cyclic-fold bifurcations, hysteresis, intermittencies, quasiperiodicity, chaotic attractors, odd-periodic windows within those attractors, Shilnikov orbits, and Shilnikov chaos.

We encountered these complex nonlinear dynamics phenomena under relatively high dissipation levels, the quality factors of the resonators examined in this study were Q

=

6.2 and 2.1. In the case of MEMS with higher quality factors

(Q > 100)

, it is quite reasonable to expect those phenomena to appear under relatively low excitation levels (compared to the static pull-in voltage). This calls for a new paradigm in the design of electrostatic MEMS that seeks to manage dynamic phenomena rather than attempt to avoid them and, thereby, overly restricting the design space. We believe this is feasible given the repeatable and predictable nature of those phenomena.

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静电微机电系统中的大振荡动力学

我们对静电 MEMS 谐振器在大激励下的动态进行了全面的实验研究。我们确定了发生大振荡的三个频率范围：由快慢动态相互作用驱动的非共振区和两个共振区。在这些区域中，我们发现了大量的动态现象，包括周期加倍分岔级联、气泡结构、同线性和循环折叠分岔、滞后、间歇、准周期性、混沌吸引子、吸引子中的奇周期窗口、希尔尼科夫轨道和希尔尼科夫混沌。我们在相对较高的耗散水平下遇到了这些复杂的非线性动力学现象，本研究中考察的谐振器的品质因数分别为 Q = 6.2 和 2.1。对于质量系数较高（Q>100）的微机电系统，在相对较低的激励水平下（与静态拉入电压相比）出现这些现象是非常合理的。这就要求在静电微机电系统的设计中采用新的范例，设法管理动态现象，而不是试图避免这些现象，从而过度限制设计空间。鉴于这些现象的可重复性和可预测性，我们认为这是可行的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Physics Reports 物理-物理：综合

CiteScore

56.10

自引率

0.70%

发文量

102

审稿时长

9.1 weeks

期刊介绍： Physics Reports keeps the active physicist up-to-date on developments in a wide range of topics by publishing timely reviews which are more extensive than just literature surveys but normally less than a full monograph. Each report deals with one specific subject and is generally published in a separate volume. These reviews are specialist in nature but contain enough introductory material to make the main points intelligible to a non-specialist. The reader will not only be able to distinguish important developments and trends in physics but will also find a sufficient number of references to the original literature.